Phase-constituents Purification of Diamond Films with [100] Texture

王兵,冉均国,苟立
DOI: https://doi.org/10.3969/j.issn.1009-3087.2004.04.014
2004-01-01
Abstract:The existence of non-diamond phases can induce low resistivities in diamond films with [100] texture. The aim of this study was to develop a new procedure that can be used to synthesize high-purified and high [100] oriented diamond films. Two improved Microwave Plasma Chemical Vapor Deposition (MWPCVD) procedures, namely nucleation-etching-growth method and nucleation-etching-growth-etching-growth… circulatory deposition method were appplied for the phase-constituents purification of diamond films with [100] texture. SEM and XRD characterization showed that films still remain their [100] orientation, while non-diamond phases has been eliminated largely.These two procedures are simple and effective for the production of high-purified and high [100] oriented diamond films.
What problem does this paper attempt to address?