Progress in Research on Silicon-based Materials of Optic Electronics Integrated Circuit and Its Devices

韦文生,张春熹,周克足,王天民
DOI: https://doi.org/10.3321/j.issn:1005-023x.2003.05.010
2003-01-01
Abstract:In this paper different silicon-based materials of optical waveguide and its loss characteristics are introduced,with focus on silicon-based optic electronics integrated circuit (OEIC). Two methods of coupling photodetector to waveguide are analyzed,and the principle of integration of silicon-based optical waveguide and silicon germanium photodetector is outlined. Methods of lasers bonded on silicon substrates are discussed and its advantages are pointed out.
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