Investigation of silicon based optoelectronic films

Zhizhen Ye,Jingyun Huang
2001-01-01
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
Abstract:The optoelectronic integrated circuit (OEIC) based on silicon is interesting in the future information techniques for its potential application. The studies of the OEIC materials mainly include those of luminescence and laser films, light wave-guide films, light modulation films and light detector films on silicon. The research statue and the application prospect of novel materials based on silicon are reviewed in this paper. The new investigation of silicon-based films (SiGe/Si, GaN/Si, ZnO/Si, LiNbO3/ Si) in the state key laboratory of silicon materials of Zhejiang university are introduced briefly at last. Key words : films based on silicon; optoelectronics integrated circuit.
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