SOI-based Optoelectronic Devices

Wei Hong
2001-01-01
Abstract:Silicon-on-insulator (SOI) is an attractive platform for fabrication of optoelectronic devices. A very thin SiO 2 film in SOI optoelectronic device makes the processing of this structure highly compatible with standard silicon CMOS technology. This technology is attractive for highly integrated optoelectronic circuits with low cost. The paper reviews recent developments in SOI based optoelectronic devices.
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