Application of SOI materials in optoelectronics

CHEN Yuan-yuan,YANG Di
DOI: https://doi.org/10.3969/j.issn.1001-5078.2012.01.003
2012-01-01
Abstract:SOI(silicon-on-insulater)material is an important kind of optical waveguide materials for silicon-based optoelectronics applications.In recent years,with the maturation of facture and manufacture technology of SOI material,the research on SOI-based optical waveguide devices have attracted more and more attentions.In this paper,the specific application of SOI material in silicon-based optoelectronics are introduced,including the recent developments in thermo-optic devices,electro-optic devices,optical coupler which connects sub-micron optical waveguide and fiber,integrated optoelectronic chip etc.Smaller waveguide cross-section is the developing direction of SOI-based optical waveguide devices in the future.
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