Progress on Si-Based Optoelectronic Devices and Integration

Zhou Zhiping,Gao Dingshan,Wang Yi,Chen Jinlin,Feng Junbo
2007-01-01
Laser & Optoelectronics Progress
Abstract:This paper summarizes the progresses in Si-based micro/nano lasers, modulators, detectors, and optical propagating and controlling devices. The emphasis is given to describe the important contributions of some novel structures such as surface plasmon, quantum well, photonic crystals and nano gratings on improving the properties and decreasing overall sizes of optoelectronic devices. The perspective of micro/nano scale monolithic integration of optical devices and electronic devices on a single chip by standard complementary mental oxide semiconductor (CMOS) technologies is also presented.
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