Design and Experiment of MEM Optical Switch by Electrostatic Actuation

王科平,葛峻,秦明
DOI: https://doi.org/10.3969/j.issn.1005-9490.2003.03.002
2003-01-01
Abstract:In this paper, we report on a new selfaligned vertical mirror MEM optical switch by electrostatic actuation. The device is composed of a vertical mirror, a cantilever and V-grooves. The mirror and V-grooves are fabricated in a one-lever mask by bulk micromachining of (100) monocrystalline silicon with anisotropic wet etchants. The fabrication process will be validated by experiment.
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