Development of the Novel Micro-Electro-Mechanical System Optical Switches

贾书海,赵小林,杨春生,张琛,蔡炳初,冯建智
DOI: https://doi.org/10.3321/j.issn:1006-2467.2003.09.034
2003-01-01
Abstract:This paper introduced the design, fabrication and performance of some novel MEMS (micro-electro-mechanical system) optical switches. A new kind of MEMS electromagnetic micro actuator was developed, which can drive mirrors enter or leave the optical path of the switch. Four optical switches of 1× 2, 2×2, 1×4 and 1×8 were fabricated, whose performance is favorable. Those optical switches can be widely used in optical fiber communication systems.
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