A new SOI technology: smart-cut

储佳,路景刚,叶龙飞,杨德仁,阙端麟
DOI: https://doi.org/10.3969/j.issn.1003-353X.2001.01.006
2001-01-01
Abstract:Smart-cut is a new technology for SOI with a salient advantage in using materials efficiently, and can lower the cost dramatically. This paper is a review on smart-cut, its principle, advantage and the affecting factors.
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