Ultra Deep Submicron Device Modeling and the Model Parameter Extraction Based Upon the BSIM3

陈松涛,刘晓彦,杜刚,韩汝琦
DOI: https://doi.org/10.3969/j.issn.1000-3819.2003.04.006
2003-01-01
Abstract:We present the st udy of ultra deep submicron MOSFET compa ct modeling for circuit simulation.Then a MOSFET compact model based on the BSIM 3 is developed.In this model,quantum eff ects and polysilicon depletion effects h ave been taken into account.Furthermore, a model parameter extraction program for threshold voltage and I-V model param et er is developed.It uses the least square method and adopts the Marquardt algorit hm to reduce the extracted result depend ence on the initial value.Moreover,the e xtracted parameter can be revised and op timized.In the end,the model and the par ameter extraction result are validated r epectively.
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