Deep Learning-Based BSIM-CMG Parameter Extraction for 10-nm FinFET

Ming-Yen Kao,Fredo Chavez,Sourabh Khandelwal,Chenming Hu
DOI: https://doi.org/10.1109/ted.2022.3181536
IF: 3.1
2022-07-26
IEEE Transactions on Electron Devices
Abstract:A new deep learning (DL)-based parameter extraction method is presented in this brief; 50k training cases are generated by Monte Carlo simulations of these preselected parameters in Berkeley short-channel IGFET model (BSIM)-common multigate (CMG). DL models are trained using backward propagation with and as the input and selected BSIM-CMG parameters as the output. A TCAD simulated FinFET device, calibrated to Intel 10-nm node, is used to test the DL models. The DL-based parameters extraction results show an excellent fit to capacitance and drain current data, with 0.16% rms error in and 6.1% rms error in (0.69% rms error in above-threshold-voltage ), respectively. In addition, devices with a 10% variation in gate length and oxide thickness are successfully modeled with the trained DL model. The results show tremendous promise in using the DL-based models for parameter extraction.
engineering, electrical & electronic,physics, applied
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