A Surface Profilometer Based on Laser Confocal Feedback

Weiping Wang,Shulian Zhang

DOI: https://doi.org/10.1364/fio.2015.fm1g.3

2015-01-01

Abstract:An optical surface profilometry method is developed based on microchip Nd:YVO4 laser feedback and confocal technologies. The signal is detected using heterodyne approach to ensure environmental robustness and invulnerability to the laser instability.

What problem does this paper attempt to address?

Surface Microstructure Profilometry Based On Laser Confocal Feedback

Weiping Wang,Shulian Zhang,Yan Li

DOI: https://doi.org/10.1063/1.4932938

IF: 1.6

2015-01-01

Review of Scientific Instruments

Abstract:demonstrate a surface microstructure profile measurement method, which utilizes the positioning ability of confocal technology and the high sensitivity of frequency-shift feedback of a microchip laser. The surface profile is measured by combination of the amplitude and phase information of the feedback light reflected by the sample. The amplitude information is used for coarse measurement and to determine the integral number of half lasing wavelengths contained in the sample profile variation. The phase information is used for fine measurement and to determine the fractional number. The measurement realizes both a large axial measuring range of tens of microns and a high axial resolution of similar to 2 nm. Meanwhile, a heterodyne phase measurement approach is introduced to compensate for environmental disturbance and to realize high axial resolution measurement under common room conditions. The surface profile of a grating is measured and proves the feasibility of the method. (C) 2015 AIP Publishing LLC.
Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement

Yueying Wang,Xu Liu,Xiang Hao

DOI: https://doi.org/10.3788/LOP230533

2023-01-01

Laser & Optoelectronics Progress

Abstract:With the rapid development of precision instrument manufacturing and semiconductor processing industry, the observation and measurement of micro-structure surface profile has become an important orientation of scientific research. Laser scanning confocal microscopy becomes popular in three-dimensional (3D) surface topography because of its high resolution, high signal- to-noise ratio, and excellent optical sectioning ability. In this paper, we first introduce the basic principle of the confocal microscopy. Further, various confocal microscopic methods used in 3D surface topography measurement are reviewed, including different scanning methods, different detection methods, and different spectral- based confocal imaging methods. Finally, the future developments of confocal microscopy are also prospected.
Single-Shot White-Light Dispersive Interferometric Profilometer

Pei Zhu,Kaiwei Wang,Shuangshuang Zhao

DOI: https://doi.org/10.1117/12.869987

2010-01-01

Abstract:Traditional interferometric profilemeter suffers from phase ambiguity problem and sensitivity to environmental disturbance, thus preventing their applications for on-line surface inspections. We propose a new method to obtain the object surface's two-dimensional profile in a single shot using a dispersive interferometer. An air-spaced Fabry-Perot etalon was applied in order to decompose the light from the broadband source into discrete monochromatic constituents with equal wavelength interval. A blazed grating is implemented to effectively separate the interferograms of difference wavelength. As a result, the interference patterns of different wavelengths distributed separately on the CCD camera. By analyzing these patterns one can get the configuration of the original surface. A one-dimensional profiling experiment is carried out to test a surface with steps and the mean error of the result is below 0.2 mu m.
Laser Confocal Feedback Profilometry

Xinjun Wan,Shulian Zhang,Zhou Ren

DOI: https://doi.org/10.1117/12.792752

2008-01-01

Abstract:In this paper, a novel profiling method, Laser Confocal Feedback Profilometery (LCFP), combining quasi-common-path heterodyne phase detection with laser confocal feedback technology, is proposed. A microchip Nd:YAG laser emits 1064nm laser, which passes through a pinhole and frequency shifter, and is focused onto the sample surface. The reflected light is coupled back to the microchip laser cavity and forms the frequency shifted feedback light, causing the laser intensity modulation. When the sample is scanned laterally, its surface height variation changes both the Phase and strength of the feedback light. LCFP then extracts both the amplitude and phase information out of the laser intensity modulation to determine the integral and fractional number of half laser wavelengths contained in the height variation of two points on the sample surface. LCFP can thus overcome the half-laser-wavelength limit of phase measurement in the axial direction. The high sensitivity of microchip laser to feedback light makes LCFP able to measure samples with very low reflectivity. The LCFP experimental setup is built, and it has successfully measured the height of the stages on a glass-substrate grating. The current performances of LCFP are as followed: the axial resolution is better than 2nm, the axial range about 5 mu m, and the detectable reflectivity as low as 10(-9). Due to its direct traceability to laser wavelength, LCFP can potentially be used as the metrology standard of small-scale features.
Two-dimensional Surface Profile Imaging Technique Based on a Double-Grating Frequency Shifter

KW Wang,LJ Zeng

DOI: https://doi.org/10.1364/ao.44.004625

IF: 1.9

2005-01-01

Applied Optics

Abstract:A two-dimensional surface profile imaging technique that uses a low-coherence heterodyne interferometer is proposed. A double-grating frequency shifter was used in a tandem interferometer to provide the achromatic frequency shift for low-coherence light. A chopper, together with a processing circuit, was implemented to modulate the interference fringes. The surface profile was measured from the interference fringes taken by a CCD camera using a five-step method. The uncertainty in the displacement measurement is 0.34 microm for a displacement range of 43 microm. The surface profile of a glass sample with low effective reflectivity was acquired.
Development of Non - contact Measurement System Based on the Integration of Laser Probe and NC Machine Tools

Jian LI,Wen WANG,Zi-chen CHEN

DOI: https://doi.org/10.3969/j.issn.1001-3881.2005.10.010

2005-01-01

Abstract:A non-contact measurement method of freeform surface was proposed,which is realized through integration of NC(numerical-controlled) machine tools and laser probe.The measurement principle of the system was introduced.The hardware and software components were analyzed and realized respectively.Finally the effectiveness of the method was verified by a measurement example.
Near Common-Path Optical Fiber Interferometer for Potentially Fast On-Line Microscale-Nanoscale Surface Measurement

Xiangqian Jiang,Kaiwei Wang,Haydn Martin

DOI: https://doi.org/10.1364/ol.31.003603

2007-01-01

SPIE Newsroom

Abstract:We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.
Surface Form Metrology of Micro-Optics

Bin Xu,Zhigang Jia,Xinghui Li,Yuan-Liu Chen,Yuki Shimizu,So Ito,Wei Gao

DOI: https://doi.org/10.1117/12.2019243

2013-01-01

Abstract:This keynote starts from an overview of micro-optics from fundamental functions, fabrication methods and applications in precision engineering and nanotechnology. State-of-the-art measuring systems for surface form metrology of microoptics with micro-structured surfaces, including diffractive micro-optics such as diffraction gratings and refractive micro-optics such as micro lenses and micro-lens arrays, are then be presented. The measuring systems introduced in the presentation are classified into scanning probe microscope-based systems, mechanical stylus profiling systems and optical evaluation systems. Related research activities carried out in the authors' group are also highlighted.
Fast Surface Measurement Using Wavelength Scanning Interferometry with Compensation of Environmental Noise

Xiangqian Jiang,Kaiwei Wang,Feng Gao,Hussam Muhamedsalih

DOI: https://doi.org/10.1364/ao.49.002903

2012-01-01

Advanced Materials Research

Abstract:A wavelength scanning interferometry system for fast areal surface measurement of micro and nano-scale surfaces which is immune to environmental noise is introduced in this paper. It can be used for surface measurement of discontinuous surface profiles by producing phase shifts without any mechanical scanning process. White light spectral scanning interferometry, together with an acousto-optic tuneable filtering technique, is used to measure both smooth surfaces and those with large step heights. An active servo control system is used to serve as a phase compensating mechanism to eliminate the effects of environmental noise. The system can be used for on-line or in-process measurement on a shop floor.
Surface Profile Measurement of Micro-Optics by Using a Long Stroke Atomic Force Microscope

So Ito,Ming Lei Li,Zhi Gang Jia,Yuan Liu Chen,Yuki Shimizu,Wei Gao

DOI: https://doi.org/10.4028/www.scientific.net/amm.870.102

2017-01-01

Applied Mechanics and Materials

Abstract:In this study, a long stroke atomic force microscope (LS-AFM) has been developed for the measurement of the micro-optics which have micrometric amplitude surface structures. An electrochemically polished tungsten wire is used as the AFM probe tip. Since the effective length of the tungsten probe is more than 100 μm, the probe tip can access valley part without the interference between the steep slope and the sidewall of the probe tip. By using the long stroke PZT Z scanner whose long stroke of 70 μm and a resolution of 1 nm, micrometric amplitude of the optical elements can be measured. A linear encoder is employed to measure the displacement of Z scanner in Z direction. A well-detected result of a prism sheet film profile has been obtained by the LS-AFM and its tapping mode.
Development of novel one-shot full-field surface profilometer using chromatic confocal microscopy

Duc Trung Nguyen,Liang-Chia Chen

DOI: https://doi.org/10.48550/arXiv.1812.06578

2019-04-11

Abstract:A novel full-field surface profilometer using diffractive-based chromatic confocal microscopy and area-scan spectral sensing is developed. A normalized cross correlation algorithm was developed to establish a spectrum-depth response curve. A measuring repeatability for a single surface depth can be controlled within 120 nanometers.

Optics,Applied Physics
Surface Bilateral Profile Measurement of Curved Transparent Components Based on Chromatic Confocal Sensor

Jiajun Wu,Xiaoxiong Jiang,Lili Jiang,Bingfeng Ju,Wule Zhu

DOI: https://doi.org/10.1117/12.2653438

2023-01-01

Abstract:The system performance of many industrial products is dominated by the surface profile accuracy of their primary component, thus it is of great essence to achieve high precision profile characterization. The chromatic confocal technology provides an effective means for precise measurement of surface profile, yet there exists non-negligible errors when measuring transparent curved component. The aim of this paper is to investigate the effects of the curvature of component on the confocal rays and obtain its bilateral surface profile by chromatic confocal technology simultaneously. The assumption of tilted plate approximation for curved specimen was made. By adopting the optical ray tracing analysis, a modified model was then proposed to correct the measurement error existed in the traditional one. The validity of the proposed model is conducted by 2D bilateral profile measurements of the hemispherical shells after the calibration with tilted fused silica plates. Experimental results show that the proposed model significantly improves the measurement accuracy of bilateral profile of curved transparent components at large equivalent tilt angle. This method overcomes the drawbacks of other spatial coordinate based profile measurement methods, and achieves high accuracy simultaneous measurement of bilateral profile of transparent components.
Frequency-Shifted Optical Feedback Measurement Technologies Using a Solid-State Microchip Laser

Kaiyi Zhu,Hongfang Chen,Shulian Zhang,Zhaoyao Shi,Yun Wang,Yidong Tan

DOI: https://doi.org/10.3390/app9010109

2018-01-01

Applied Sciences

Abstract:Since its first application toward displacement measurements in the early-1960s, laser feedback interferometry has become a fast-developing precision measurement modality with many kinds of lasers. By employing the frequency-shifted optical feedback, microchip laser feedback interferometry has been widely researched due to its advantages of high sensitivity, simple structure, and easy alignment. More recently, the laser confocal feedback tomography has been proposed, which combines the high sensitivity of laser frequency-shifted feedback effect and the axial positioning ability of confocal microscopy. In this paper, the principles of a laser frequency-shifted optical feedback interferometer and laser confocal feedback tomography are briefly introduced. Then we describe their applications in various kinds of metrology regarding displacement measurement, vibration measurement, physical quantities measurement, imaging, profilometry, microstructure measurement, and so on. Finally, the existing challenges and promising future directions are discussed.
Surface Profile Measurement Using Chromatic Confocal Microscopy

KB Shi,P Li,SZ Yin,ZW Liu

DOI: https://doi.org/10.1117/12.571595

2004-01-01

Abstract:We investigate lateral and axial chromatic confocal microscopy using supercontinuum white light, and its application to surface profile measurement. In the systems that we describe here, the lateral or the axial scanning is effectively realized by focusing different wavelengths of the supercontinuum to either different lateral or axial positions through purposely introduced chromatic dispersion and aberration respectively. As a result, the imaging speed can be greatly improved. We use this system to demonstrate the surface profile measurement of a microcircuit chip, with a sensitivity of 8.5 nm and a depth measurement range of about 7 microns.
Development of laser feedback interferometer based on Nd:YAG microchip lasers

Song Zhang,Shulian Zhang,Zhou Ren

DOI: https://doi.org/10.3969/j.issn.1007-2276.2011.10.017

2011-01-01

Abstract:Microchip laser has exhibited ultrahigh sensitivity to optical feedback, which plays an important role in the laser feedback measurement technology. The quasi-common-path microchip laser feedback interferometer can effectively suppress the error caused by the non-compensated external cavity length by frequency shifting and multiplexing while it can keep the advantage of microchip laser's high sensitivity and the high resolution. It can measure the non-cooperative targets without contact, which can fill the blank in precision displacement measurement with laser interferometer. Compared with Agilent5529A dual-frequency interferometer, the indexes of the laser feedback interferometer are obtained. The linearity is better than 3 × 10 -5, measuring range is 50 mm and standard-deviation is about 200 nm.
Full Area Covered 3D Profile Measurement of Special-Shaped Optics Based on a New Prototype Non-Contact Profiler.

Hui-Lin Du,Zhao-Zhong Zhou,Ze-Qing Sun,Bing-Feng Ju,Shaoning Xu,Anyu Sun

DOI: https://doi.org/10.1063/1.4984124

IF: 1.6

2017-01-01

Review of Scientific Instruments

Abstract:A new prototype non-contact profiler based on surface tracking has been specially developed. Surface tracking is carried out by a specially designed dual stage probe system with the aid of a four-Degree Of Freedom high-precision motion platform. The dual stage probe system keeps a short-range optical probe constantly tracking the surface by a self-developed voice coil motor servo, by which a wide measuring range of up to 10 mm is realized. The system performance evaluation including resolution, repeatability, and scanning speed proved the good capability of the new prototype non-contact profiler. To realize a full area covered 3D profile measurement of special-shaped optics within one scanning procedure, a signal intensity monitor integrated in the surface tracking controller is specially developed. In the experiment, a snip-single-corner-rectangular-shaped freeform surface was successfully measured over full area by the new non-contact profiler. This work provides an effective solution for 3D profile measurement of special-shaped optical surfaces over full reflecting area. Experimental results demonstrate that the proposed measuring system is of great significance in quality evaluation of optical surfaces.
Laser Heterodyne Profilometer with Several Improved Techniques

X LI,J WANG,Y ZHAO,M CAO,DC LI

DOI: https://doi.org/10.1117/12.162104

1993-01-01

Abstract:An optical heterodyne system for the measurement of profile and roughness has been developed. Several improved techniques are employed. The optical system was designed with entire common path. The effect of sample vibration and the thermal drift could be eliminated. A modified objective was used to perform respectively the measurement beam and the reference beam. The detected signals were processed with phase comparison technique to give a high accuracy. The optical system can be developed to an accessory of the Zeeman laser interferometers.
Laser confocal feedback tomography and nano-step height measurement

Yidong Tan,Weiping Wang,Chunxin Xu,Shulian Zhang

DOI: https://doi.org/10.1038/srep02971

IF: 4.6

2013-01-01

Scientific Reports

Abstract:A promising method for tomography and step height measurement is proposed, which combines the high sensitivity of the frequency-shifted feedback laser and the axial positioning ability of confocal microscopy. By demodulating the feedback-induced intensity modulation signals, the obtained amplitude and phase information are used to respectively determine the coarse and fine measurement of the samples. Imaging the micro devices and biological samples by the demodulated amplitude, this approach is proved to be able to achieve the cross-sectional image in highly scattered mediums. And then the successful height measurement of nano-step on a glass-substrate grating by combination of both amplitude and phase information indicates its axial high resolution (better than 2 nm) in a non-ambiguous range of about ten microns.
Dynamic Confocal Optical Probe Based on Time Difference Measurement

FAN Yu-ming,ZHANG Guo-xiong,GAO Xiang,QIU Zu-rong,Guo jing-bin,ZHANG Hong-wei,LI Zhi,ZHAO Shu-zhong

DOI: https://doi.org/10.3969/j.issn.0493-2137.2005.05.007

2005-01-01

Abstract:Based on a study on an optical dynamic active confocal probe, a new method of measuring deviation focus is developed in order to meet the increasing requirements of the dimensional control and profile monitoring of the products such as mechanical, optical and electronic ones. The key point of this new method is that displacement of the turning fork is converted to time difference measurement, thus the optical and mechanical structures of the laser probe system can be simplified greatly, and its accuracy and stability are enhanced. Then a new integrated measurement system is designed with error analyzed in detail. Experiments evaluating nonlinearity and measuring range and performance are carried out. Results show that the nonlinearity error is 0.45 μm within the range of ±0.1 mm, and its response is 0.075 μm.
Fast Full-Field 3D Surface Profilometry by Heterodyne Interferometry of a Femtosecond Laser

Liheng Shi,Yue Wang,Guanhao Wu

DOI: https://doi.org/10.1364/cleo_at.2022.ath1d.7

2022-01-01

Abstract:We present an interferometer of a femtosecond laser for fast full-field 3D surface profilometry. The heterodyne interference is introduced to reduce the requirement of camera’s frame rate, thus achieving an enhancement on the measured speed. This method has experimentally demonstrated to increase the measurement speed several fold without significant loss of precision.

A Surface Profilometer Based on Laser Confocal Feedback

Surface Microstructure Profilometry Based On Laser Confocal Feedback

Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement

Single-Shot White-Light Dispersive Interferometric Profilometer

Laser Confocal Feedback Profilometry

Two-dimensional Surface Profile Imaging Technique Based on a Double-Grating Frequency Shifter

Development of Non - contact Measurement System Based on the Integration of Laser Probe and NC Machine Tools

Near Common-Path Optical Fiber Interferometer for Potentially Fast On-Line Microscale-Nanoscale Surface Measurement

Surface Form Metrology of Micro-Optics

Fast Surface Measurement Using Wavelength Scanning Interferometry with Compensation of Environmental Noise

Surface Profile Measurement of Micro-Optics by Using a Long Stroke Atomic Force Microscope

Development of novel one-shot full-field surface profilometer using chromatic confocal microscopy

Surface Bilateral Profile Measurement of Curved Transparent Components Based on Chromatic Confocal Sensor

Frequency-Shifted Optical Feedback Measurement Technologies Using a Solid-State Microchip Laser

Surface Profile Measurement Using Chromatic Confocal Microscopy

Development of laser feedback interferometer based on Nd:YAG microchip lasers

Full Area Covered 3D Profile Measurement of Special-Shaped Optics Based on a New Prototype Non-Contact Profiler.

Laser Heterodyne Profilometer with Several Improved Techniques

Laser confocal feedback tomography and nano-step height measurement

Dynamic Confocal Optical Probe Based on Time Difference Measurement

Fast Full-Field 3D Surface Profilometry by Heterodyne Interferometry of a Femtosecond Laser