Fast Full-Field 3D Surface Profilometry by Heterodyne Interferometry of a Femtosecond Laser

Liheng Shi,Yue Wang,Guanhao Wu
DOI: https://doi.org/10.1364/cleo_at.2022.ath1d.7
2022-01-01
Abstract:We present an interferometer of a femtosecond laser for fast full-field 3D surface profilometry. The heterodyne interference is introduced to reduce the requirement of camera’s frame rate, thus achieving an enhancement on the measured speed. This method has experimentally demonstrated to increase the measurement speed several fold without significant loss of precision.
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