Ultrafast Surface Inspection Using Hybrid Dispersion Laser Scanner

Hongwei Chen,Keisuke Goda,Chao Wang,Bahram Jalali
DOI: https://doi.org/10.1364/cleo_at.2013.ctu3o.2
2013-01-01
Abstract:We report an ultrafast surface inspection method using a hybrid dispersion laser scanner. Using the technique, we demonstrate real-time detection of microparticles on silicon wafer surfaces at 1,000 times higher scan rates than conventional methods.
What problem does this paper attempt to address?