Large-Field Step-Structure Surface Profilometry using a Femtosecond Laser

Yue Wang,Guangyao Xu,Shilin Xiong,Guanhao Wu
DOI: https://doi.org/10.1364/CLEO_AT.2020.AF3M.7
2020-01-01
Abstract:We present a femtosecond laser based interferometer for step-structure surface measurement. The synthetic-wavelength method is adopted to bridge the envelope positioning and carrier phase extraction methods. A three step surface is precisely reconstructed.
What problem does this paper attempt to address?