Traceable calibration method of cantilever stiffness based on theprinciple of electrostatic force

Han Yaqian,Zhao Meirong,Liu Ming,Sun Peiyuan,Song Le
DOI: https://doi.org/10.19650/j.cnki.cjsi.2017.06.019
2017-01-01
Abstract:Lot of micro-nano force measurement systems are set up and very high measurement accuracy is obtained.However,transferring of micro-nano force value is rarely studied.Using the passive cantilever as a transferred standard of micro-nano force value,''analogous reference cantilever method''is presented on the basis of the principle of electrostatic force.The cantilever stiffness can be accurately and conveniently measured and be traced to the international unit (SI) such as displacement,voltage and capacitance.Utilized''analogous reference cantilever method'',the cantilever with normal stiffness 1.45 ~ 91 N/m is test,the relative variance is less than 0.6%,the results show that the analogous reference cantilever method has good stability.The factors affected the measured results are analyzed experimentally or theoretically.Combined measurement uncertainty of''analogous reference cantilever method''to measure the stiffness of cantilever is less than 5%,which shows the feasibility of the proposed method.''Analogous reference cantilever method''effectively improves the uncertainty of cantilever stiffness test,and indicates significance in the high-precision micro-nano force value measurement of AFM.
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