Recovery of Failed Resistive Switching Random Access Memory Devices by A Low-Temperature Supercritical Treatment

Xiaoqin Du,Xiaojing Wu,Chang,Chih-Hung Pan,Cheng-Hsien Wu,Yu-Shuo Lin,Po-Hsun Chen,Shengdong Zhang,Simon M. Sze
DOI: https://doi.org/10.7567/apex.10.064001
IF: 2.819
2017-01-01
Applied Physics Express
Abstract:The successful recovery of resistive switching random access memory (RRAM) devices that have undergone switching failure is achieved by introducing a low-temperature supercritical-fluid process that passivates the switching layer. These failed RRAM devices, which are incapable of switching between high-and low-resistance states, were treated with supercritical carbon dioxide with pure water at 120 degrees C for 1 h. After the treatment, the devices became operational again and showed excellent current-voltage (I-V) characteristics and reliability as before. On the basis of the current conduction mechanism fitting results, we propose a model to explain the phenomenon. (C) 2017 The Japan Society of Applied Physics
What problem does this paper attempt to address?