Abstract:Sapphire has shown broad application prospects in military and medical fields, due to its high hardness, excellent corrosion resistance and high transmission in the infrared band. However, these characteristics have also brought about lots of difficulties in machining or chemical etching the material. Femtosecond laser processing with excellent characteristics including small heat-affected zones and high processing resolution ratio, has become an emerging field. Therefore, it has important application prospects and has found increasingly wide applications in the fields of material modification and high-quality fabrication of three-dimensional micro-nano structures and devices. In this paper, we propose a method in which femtosecond laser processing based on multi-photon absorption is used to process sapphire beyond the optical diffraction limit. In this work, femtosecond laser with a central wavelength of 343 nm is focused on the sapphire and the surface of sapphire is scanned with the high-precision piezoelectric positioning stages. Nano structures each with a width of about 61 nm are obtained, and the minimum space between the nano structures could be as short as about 142 nm. Further, the influences on the processing resolution from laser power and scanning speed are investigated and the generation mechanism for the nano-ripple structure is discussed. Finally, femtosecond laser processing on the sapphire with a resolution beyond the optical diffraction limit is achieved. This work provides a reference for processing the hard and brittle materials by femtosecond laser.

Multilevel Phase-Type Diffractive Lens Embedded in Sapphire.

Fabrication of High Temperature Resistant Geometric Phase Element Inside Sapphire by Femtoesecond Laser

Ultrafast Laser-Inscribed Nanogratings in Sapphire for Geometric Phase Elements.

Sapphire-Based Fresnel Zone Plate Fabricated by Femtosecond Laser Direct Writing and Wet Etching

Aplanatic Zone Plate Embedded in Sapphire

Centimeter-Sized Aplanatic Hybrid Diffractive-Refractive Lens

Phase Lenses and Mirrors Created by Laser Micronanofabrication Via Two-Photon Photopolymerization

Multilevel Phase Supercritical Lens Fabricated by Synergistic Optical Lithography

Phase-Type Fresnel Zone Plate with Multi-Wavelength Imaging Embedded in Fluoroaluminate Glass Fabricated via Ultraviolet Femtosecond Laser Lithography

Sub-diffraction-limit fabrication of sapphire by femtosecond laser direct writing

High-Efficiency Spiral Zone Plates in Sapphire

Femtosecond Laser Ablation for Manufacturing of X-ray Lenses and Phase Corrector Plates

Large-Scale High-Accuracy and High-Efficiency Phase Plate Machining

Fabricate Planar Photonic Crystal Gradient Index Lens by Laser Interference Lithography

Fabrication of an Anti-Reflective Microstructure on Sapphire by Femtosecond Laser Direct Writing.

Wafer-scale High Aspect-Ratio Sapphire Periodic Nanostructures Fabricated by Self-Modulated Femtosecond Laser Hybrid Technology.

A Novel Plasmonic Zone Plate Lens Based on Nano-Slits with Refractive Index Modulation

Optical-Lattice-Like Waveguide Structures in Ti: Sapphire by Femtosecond Laser Inscription for Beam Splitting

Detour-phased Perovskite Ultrathin Planar Lens Using Direct Femtosecond Laser Writing

High-Efficiency Fabrication of Geometric Phase Elements by Femtosecond-Laser Direct Writing

Laser-written scalable sapphire integrated photonics platform