Abstract:So far, nanostructuring of hard optical crystals has been exclusively limited to their surface, as stress-induced crack formation and propagation render high-precision volume processes ineffective<a data-track="click" data-track-action="reference anchor" data-track-label="link" data-test="citation-ref" aria-label="Reference 1" title="Gamaly, E. G. et al. Laser–matter interaction in the bulk of a transparent solid: confined microexplosion and void formation. Phys. Rev. B 73, 214101 (2006)." href="/articles/s41566-018-0327-9#ref-CR1" id="ref-link-section-d351e438">1</a>,<a data-track="click" data-track-action="reference anchor" data-track-label="link" data-test="citation-ref" aria-label="Reference 2" title="Juodkazis, S., Mizeikis, V. & Misawa, H. Three-dimensional microfabrication of materials by femtosecond lasers for photonics applications. J. Appl. Phys. 106, 051101 (2009)." href="/articles/s41566-018-0327-9#ref-CR2" id="ref-link-section-d351e441">2</a>. Here, we show that the rate of nanopore chemical etching in the popular laser crystals yttrium aluminium garnet and sapphire can be enhanced by more than five orders of magnitude (from <0.6 nm h−1 to ~100 µm h−1) by the use of direct laser writing, before etching. The process makes it possible to produce arbitrary three-dimensional nanostructures with 100 nm feature sizes inside centimetre-scale laser crystals without brittle fracture. To showcase the potential of the technique we fabricate subwavelength diffraction gratings and nanostructured optical waveguides in yttrium aluminium garnet and millimetre-long nanopores in sapphire. The approach offers a pathway for transferring concepts from nanophotonics to the fields of solid-state lasers and crystal optics.

Imaging with Diffractive Axicons Rapidly Milled on Sapphire by Femtosecond Laser Ablation

Free‐Form Micro‐Optics out of Crystals: Femtosecond Laser 3D Sculpturing

Fraxicon for Optical Applications with Aperture ∼1 mm: Characterisation Study

Design, fabrication, and testing of diamond axicons for X-ray microscopy applications

Fabrication of Optical Elements with Femtosecond Doubled-Frequency Ti:sapphire Laser

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Dynamic Airy Imaging Through High-Efficiency Broadband Phase Microelements by Femtosecond Laser Direct Writing

Wet-etching-assisted femtosecond laser holographic processing of a sapphire concave microlens array.

Fabrication of micro-axicons using direct-laser writing.

High-performance Axicon Lenses Based on High-Contrast, Multilayer Gratings

Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing

3D printing of polymeric optical components by two-photon polymerization

High Speed Precise Refractive Index Modification for Photonic Chips through Phase Aberrated Pulsed Lasers

High-fidelity glass micro-axicons fabricated by laser-assisted wet etching

Three-dimensional femtosecond laser nanolithography of crystals

Single-pulse Writing of a Concave Microlens Array.

Femtosecond Laser Ablation for Manufacturing of X-ray Lenses and Phase Corrector Plates

Fabrication of Refractive Axicons Utilizing Electrostatic Force

Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

High Precision Femtosecond Laser Prototyping of Micro-Optical Components

Fabrication of the Asymmetric Double-Sided Concave Microlens Arrays by Femtosecond Laser