Abstract:Although polymer nanoimprinting on glass substrates has been widely employed for the fabrication of functional anti-reflective (AR) nanostructures, several drawbacks exist with respect to durability and delamination. The direct patterning of glass material is a potential solution for outdoor applications that require AR functional nanostructured glass plates. In this study, a glass imprinting technique was employed for the fabrication of an AR nanostructure on a soda-lime glass substrate using a vitreous carbon (VC) stamp. The VC stamp, which had a high aspect ratio nanopost array with a pitch of 325 nm, diameter of 110 nm, and height of ~220 nm, was fabricated by the carbonization of a replicated Furan precursor from an Si master. During the glass imprinting process using the nanopost array VC stamp, the softened glass material gradually protruded into the spaces between the nanopins owing to viscoelastic behavior, and one can achieve a cross-sinusoidal surface relief under specific imprinting condition, which can be used as an AR nanostructure with a gradually increasing refractive index. The effects of the processing temperature on the surface profile of the glass imprinted parts and the measured transmission spectra were analyzed, and a glass imprinting temperature of 700 °C and pressure of 1 MPa were found to be the optimum condition. The height of the fabricated cross-sinusoidal nanostructure was 80 nm, and the light transmission was increased by ~2% over the entire visible-light range. Furthermore, the measured transmission spectrum observed to be in good agreement with the simulation results.

High-fidelity glass micro-axicons fabricated by laser-assisted wet etching

Fabrication of micro-axicons using direct-laser writing.

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Imaging with Diffractive Axicons Rapidly Milled on Sapphire by Femtosecond Laser Ablation

Fabrication of Refractive Axicons Utilizing Electrostatic Force

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Microfabrication and Surface Functionalization of Soda Lime Glass through Direct Laser Interference Patterning

Fabrication of the Asymmetric Double-Sided Concave Microlens Arrays by Femtosecond Laser

Optical Nanofabrication of Concave Microlens Arrays

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Fabrication of Cross-Sinusoidal Anti-Reflection Nanostructure on a Glass Substrate Using Imperfect Glass Imprinting with a Nano-Pin Array Vitreous Carbon Stamp

Maskless Fabrication Of Concave Microlens Arrays On Silica Glasses By A Femtosecond-Laser-Enhanced Local Wet Etching Method

Self-cleaning anti-fog micro-nanostructures by laser marker patterning nickel-coated glass

Laser formation of tip emitting structures with high aspect ratio on glass-carbon field-emission cathodes

Femtosecond laser microfabrication of micro-optic elements in glass

Free‐Form Micro‐Optics out of Crystals: Femtosecond Laser 3D Sculpturing

Self-reconstructing Bessel beam created by two-photon-polymerized micro-axicon for light-sheet fluorescence microscopy

Micro-nano fabrication of femtosecond laser wet etch

High-performance Axicon Lenses Based on High-Contrast, Multilayer Gratings

A Facile Method to Fabricate Close-Packed Concave Microlens Array on Cylindrical Glass

monolithically integrated into 3 D glass micro fl uidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis †