Abstract:The advent of planar metalenses, including the super-oscillatory lens (SOL) and the supercritical lens (SCL) with distinctive interference properties, has profoundly impacted on the long-lasting perception of the far-field optical diffraction limit. In spite of its conspicuous success in achieving marvelously small focal spots, the planar metalens still faces tough design and fabrication challenges to realize high focusing efficiency. In this work, we demonstrated a dual-mode laser fabrication technique based on two-photon polymerization for realizing the multilevel phase SCL with focusing efficiency spiking. Synergistically controlling two types of movement trajectory, which is implemented with the piezo stage and the scanning galvo mirror, enables the fabrication of complicated structures with sub-diffraction-limit feature size. By utilizing such advantage, SCLs with discretized multilevel phase configurations are explicitly patterned. The experimental characterization results have shown that a four-level phase SCL can focus light into a sub-diffraction-limit spot with the lateral size of 0.41 λ/NA (NA is the numerical aperture), while achieve the focal spot intensity and the energy concentration ratio in the focal region 7.2 times and 3 times that of the traditional binary amplitude-type SCL with the same optimization conditions, respectively. Our results may release the application obstacles for the sub-diffraction-limit planar metalens and enable major advances in the fields from label-free optical super-resolution imaging to high precision laser fabrication.

Phase Lenses and Mirrors Created by Laser Micronanofabrication Via Two-Photon Photopolymerization

Multilevel Phase Supercritical Lens Fabricated by Synergistic Optical Lithography

Molded Transparent Photopolymers and Phase Shift Optics for Fabricating Three Dimensional Nanostructures.

Micro Lens Fabrication by Means of Femtosecond Two Photon Photopolymerization

Diffractive Microlens with A Cascade Focal Plane Fabricated by Single Mask Uv-Photolithography and Common Koh:H(2)O Etching

Femtosecond Laser-Induced Two-Photon Polymerization: A New Avenue Towards Microoptics and Micromechanics

Fabrication of Embedded Microball Lens in PMMA with High Repetition Rate Femtosecond Fiber Laser.

Protein-based soft micro-optics fabricated by femtosecond laser direct writing

Microlens formation technology utilizing multi-phase liquid ambiance

Laser Micro-Fabrication/Manipulation of Dielectric Materials

Progress In Femtosecond Laser Fabrication Of Microlens Array With Spatial Light Modulators

Optical Nanofabrication of Concave Microlens Arrays

Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

Multilevel Phase-Type Diffractive Lens Embedded in Sapphire.

Analysis Of Micro Lens Fabrication Via Femtosecond Laser

Photon Nanojet Lens: Design, Fabrication and Characterization

A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

High Precision Femtosecond Laser Prototyping of Micro-Optical Components

Micro-Fabrication By Femtosecond Laser Pulses

Fabrication of Microlens Arrays in Photosensitive Glass by Femtosecond Laser Direct Writing