Abstract:Sapphire has shown broad application prospects in military and medical fields, due to its high hardness, excellent corrosion resistance and high transmission in the infrared band. However, these characteristics have also brought about lots of difficulties in machining or chemical etching the material. Femtosecond laser processing with excellent characteristics including small heat-affected zones and high processing resolution ratio, has become an emerging field. Therefore, it has important application prospects and has found increasingly wide applications in the fields of material modification and high-quality fabrication of three-dimensional micro-nano structures and devices. In this paper, we propose a method in which femtosecond laser processing based on multi-photon absorption is used to process sapphire beyond the optical diffraction limit. In this work, femtosecond laser with a central wavelength of 343 nm is focused on the sapphire and the surface of sapphire is scanned with the high-precision piezoelectric positioning stages. Nano structures each with a width of about 61 nm are obtained, and the minimum space between the nano structures could be as short as about 142 nm. Further, the influences on the processing resolution from laser power and scanning speed are investigated and the generation mechanism for the nano-ripple structure is discussed. Finally, femtosecond laser processing on the sapphire with a resolution beyond the optical diffraction limit is achieved. This work provides a reference for processing the hard and brittle materials by femtosecond laser.

Ultrafast Laser-Inscribed Nanogratings in Sapphire for Geometric Phase Elements.

Fabrication of High Temperature Resistant Geometric Phase Element Inside Sapphire by Femtoesecond Laser

High-Efficiency Fabrication of Geometric Phase Elements by Femtosecond-Laser Direct Writing

Sapphire-Based Fresnel Zone Plate Fabricated by Femtosecond Laser Direct Writing and Wet Etching

Multilevel Phase-Type Diffractive Lens Embedded in Sapphire.

Ultralow-loss geometric phase and polarization shaping by ultrafast laser writing in silica glass

Wafer-scale High Aspect-Ratio Sapphire Periodic Nanostructures Fabricated by Self-Modulated Femtosecond Laser Hybrid Technology.

Laser-Inscribed Stress-Induced Birefringence of Sapphire.

Nanoscale investigations of femtosecond laser induced nanogratings in optical glasses

Research advances of femtosecond laser-induced nanogratings for transparent materials

Low-Loss Geometric Phase Elements by Femtosecond Laser Writing in Silica Glass

Polarization Behavior of Femtosecond Laser Written Optical Waveguides in Ti:Sapphire

Low-loss Geometrical Phase Elements by Ultrafast Laser Writing in Silica Glass

Evolution of self-organized nanograting from the pre-induced nanocrack-assisted plasma–laser coupling in sapphire

Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing

Formation of In-Volume Nanogratings in Glass Induced by Spatiotemporally Focused Femtosecond Laser Pulses

High-fidelity Visualization of Formation of Volume Nanogratings in Porous Glass by Femtosecond Laser Irradiation

Sub-diffraction-limit fabrication of sapphire by femtosecond laser direct writing

High-Efficiency Spiral Zone Plates in Sapphire

Multi-Parametric Birefringence Control in Ultrashort-Pulse Laser-Inscribed Nanolattices in Fluorite

Femtosecond Laser Nanostructuring on a 4H-Sic Surface by Tailoring the Induced Self-Assembled Nanogratings