Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

Evolution of self-organized nanograting from the pre-induced nanocrack-assisted plasma–laser coupling in sapphire

Ultrafast Laser-Inscribed Nanogratings in Sapphire for Geometric Phase Elements.

Femtosecond Laser Nanostructuring on a 4H-Sic Surface by Tailoring the Induced Self-Assembled Nanogratings

Self-assembled Three-Dimensional Periodic Micro-Nano Structures in Bulk Quartz Crystal Induced by Femtosecond Laser Pulses.

Nanoscale investigations of femtosecond laser induced nanogratings in optical glasses

Formation of In-Volume Nanogratings in Glass Induced by Spatiotemporally Focused Femtosecond Laser Pulses

Internal Surface Plasmon Excitation as the Root Cause of Laser-Induced Periodic Plasma Structure and Self-Organized Nanograting Formation in the Volume of Transparent Dielectric

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Deepening of nanograting structures on Si by a two-step laser spatial-selective amorphization strategy combined with chemical etching

Laser induced micro-cracking of Zr-based metallic glass using 1011 W/m2 nano-pulses

Self-Organized Nanogratings in Glass Irradiated by Ultrashort Light Pulses

Femtosecond Laser Induced Rotated 3D Self-Organized Nanograting in Fused Silica.

Periodic surface micro-nanostructures on GaN films induced by femtosecond laser irradiation

Research advances of femtosecond laser-induced nanogratings for transparent materials

The crack propagation and surface formation mechanism of single crystalline diamond by a nanosecond pulsed laser

Formation of Si Nanocrystals in Glass by Femtosecond Laser Micromachining

Regulation of laser-induced nanogratings by tuning Marangoni-SPPs coupling effect

The Three-Level Ripples Induced by Femtosecond Laser on a 6H-Sic Single Crystal and the Formation Mechanism

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Femtosecond Self-Reconfiguration of Laser-Induced Plasma Patterns in Dielectrics

Laser printed nano-gratings: orientation and period peculiarities