Abstract:Vanadium dioxide is a material that has a reversible metal-insulator phase change near 68 °C. To grow VO2 on a wide variety of substrates, with wafer-scale uniformity and angstrom level control of thickness, the method of atomic-layer deposition was chosen. This ALD process enables high-quality, low-temperature (≤150 °C) growth of ultrathin films (100-1000 Å) of VO2. For this demonstration, the VO2 films were grown on sapphire substrates. This low temperature growth technique produces mostly amorphous VO2 films. A subsequent anneal in an ultra-high vacuum chamber with a pressure of 7x10-4 Pa of ultra-high purity (99.999%) oxygen produced oriented, polycrystalline VO2 films. The crystallinity, phase, and strain of the VO2 were determined by Raman spectroscopy and X-ray diffraction, while the stoichiometry and impurity levels were determined by X-ray photoelectron spectroscopy, and finally the morphology was determined by atomic force microscopy. These data demonstrate the high-quality of the films grown by this technique. A model was created to fit to the data for VO2 in its metallic and insulating phases in the near infrared spectral region. The permittivity and refractive index of the ALD VO2 agreed well with the other fabrication methods in its insulating phase, but showed a difference in its metallic state. Finally, the analysis of the films' optical properties enabled the creation of a wavelength- and temperature-dependent model of the complex optical refractive index for developing VO2 as a tunable refractive index material.

Growth of A-Axis Oriented Vanadium Dioxide Polycrystals on Glass Substrates

Growth Mode and Texture Study in Vanadium Dioxide Thin Films Deposited by Magnetron Sputtering

New Growth Mode of Vanadium Dioxide Films

Growth and Physical Properties of Vanadium Oxide Thin Films with Controllable Phases

Single-Crystalline Epitaxy And Twinned Structure Of Vanadium Dioxide Thin Film On (0001) Sapphire

Growth, Electrical, and Optical Properties of Nanocrystalline Vo2 (011) Thin Films Prepared by Thermal Oxidation of Magnetron Sputtered Vanadium Films

Epitaxial Growth and Metal-Insulator Transition of Vanadium Oxide Thin Films with Controllable Phases

Facile Synthesis Of Various Epitaxial And Textured Polymorphs Of Vanadium Oxide Thin Films On The (0006)-Surface Of Sapphire Substrates

Preparation and structural properties of highly c-axis oriented V2O5 thin films by pulsed laser deposition

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model

Vanadium Dioxide-Based One-Dimensional Hybrid Photonic Crystal Nanostructure with Tunable Thermal Characteristics

Ultra-Long, Free-Standing, Single-Crystalline Vanadium Dioxide Micro/Nanowires Grown by Simple Thermal Evaporation

Synthesis of Vanadium Dioxide Thin Films on Conducting Oxides and Metal–insulator Transition Characteristics

Thermochromatic vanadium dioxide (VO2) thin films synthesized by atomic layer deposition and post-treatments

Thermally driven V<sub>2</sub>O<sub>5</sub>nanocrystal formation and the temperature-dependent electronic structure study

Regulation of morphology and structure of vanadium dioxide via a hydrothermal method for optimizing performances

Substrate Effect on the Growth and Thermal Electrical Properties of Vanadium Oxide Thin Films

Tuning Phase Transition Kinetics Via Van Der Waals Epitaxy of Single Crystalline VO2 on Hexagonal-Bn

Epitaxial Growth of Well-Aligned Single-Crystalline VO2 Micro/ Nanowires Assisted by Substrate Facet Confinement

Tailoring Vanadium Dioxide Film Orientation using Nanosheets: A Combined Microscopy, Diffraction, Transport and Soft X-ray in Transmission Study

Orientated Growth of V2o5 Electrochromic Thin Films on Transparent Conductive Glass by Pulsed Excimer Laser Ablation Technique