Synthesis of Vanadium Dioxide Thin Films on Conducting Oxides and Metal–insulator Transition Characteristics

Yanjie Cui,Xinwei Wang,You Zhou,Roy Gordon,Shriram Ramanathan
DOI: https://doi.org/10.1016/j.jcrysgro.2011.10.025
IF: 1.8
2011-01-01
Journal of Crystal Growth
Abstract:We report on growth and physical properties of vanadium dioxide (VO2) films on model conducting oxide underlayers (Nb-doped SrTiO3 and RuO2 buffered TiO2 single crystals). The VO2 films, synthesized by rf sputtering, are highly textured as seen from X-ray diffraction. The VO2 film grown on Nb doped SrTiO3 shows over two orders of magnitude metal–insulator transition, while VO2 film on RuO2 buffered TiO2 shows a smaller resistance change but with an interesting two step transition. X-ray photoelectron spectroscopy has been performed as a function of depth on both sets of structures to provide mechanistic understanding of the transition characteristics. We then investigate voltage-driven transition in the VO2 films grown on Nb-doped SrTiO3 substrate as a function of temperature. The present study contributes to efforts towards correlated oxide electronics utilizing phase transitions.
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