Cluster Growth in Cluster Beam Deposition Process by Direct Simulation Monte Carlo

hiroshi mizuseki,ying jin,jingzhi yu,yoshiyuki kawazoe
DOI: https://doi.org/10.3379/jmsjmag.23.s1_103
1999-01-01
Journal of the Magnetics Society of Japan
Abstract:A cluster growth model based on Direct Simulation Monte Carlo (DSMC) is introduced to examine the effect of experimental conditions in cluster beam deposition process. We simulate the behavior of cluster and inert gas in the flight path in the equipment for cluster beam deposition under different experimental conditions, which are flight path length, ratio of the material gas to the inert gas, and temperature of the outer wall of the equipment. Several size distributions of the cluster under various conditions are obtained by this model. The results of the present simulation show that the size distribution strongly depends on the experimental conditions. In other words, the size distribution of cluster can be controlled by changing the experimental conditions.
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