Formation Of Te Clusters In Ionized Cluster Beam Deposition Technique

J.Y. Feng,F.W. Zhang,Y. Zheng,Y.D. Fan
DOI: https://doi.org/10.1016/0168-583X(94)00338-6
1995-01-01
Abstract:A retarding field method is used to measure the size distribution and the average size of Te clusters at various temperatures. From the dependence of the net ion current on the retarding voltage, we find the distribution of cluster sizes. The average cluster size is determined by the atom flux of ionized clusters and their charge flux. The experimental results show that the average size altered from 30 to 281 atoms when the crucible temperature changed from 650 to 790 K.
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