Morphological Studies of Nanostructures from Directed Cluster Beam Deposition

J. B. Chen,J. F. Zhou,A. Häfele,C. R. Yin,W. Kronmüller,M. Han,H. Haberland
DOI: https://doi.org/10.1140/epjd/e2005-00153-2
2005-01-01
Abstract:Tin clusters with a most probable size of 2.2 nm are formed from a magnetron plasma aggregation cluster source and deposited on the amorphous carbon and silicon surface. The morphologies of the cluster-based nanostructures formed by directed cluster beam deposition with different cluster energies and incident angles are analyzed based on the transmission electron microscope (TEM) and atomic force microscope (AFM) observation.
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