Recent Progress of the Tiled-Grating Research

Yanlei Zuo,Xiaofeng Wei,Qihua Zhu,Xiao Wang,Wei Han,Zheng Huang,Hongjie Liu,Chuntong Ying

IF: 2.56

2007-01-01

Chinese Optics Letters

Abstract:In this article, we present some new progress in the tiled-grating field which mainly includes the theoretical description of all the errors existing in the tiled-grating system and the experimental setup used to eliminate the errors.

What problem does this paper attempt to address?

Theoretical and experimental study of grating tiling

Zuo Yan-Lei,Wei Xiao-Feng,Zhu Qi-Hua,Liu Hong-Jie,Xiao Wang,Zheng Huang,Yi Guo,Ying Chun-Tong

DOI: https://doi.org/10.7498/aps.56.5233

2007-01-01

Abstract:A detailed scheme by which the status of tiled gratings can be inspected in a real-time way is put forward. The He-Ne laser is shown to be inappropriate for the grating-tiling experiment where 1740/mm grating is used. A method is proposed by which the wavelength can be selected for the real-time measurement, so that the impact of all sorts of errors of the tiled gratings on the main beam(l053 nm) and the beam for measurement is completely identical, which has been demonstrated by experiment.
Design of Large-Deflection-angle High-Diffraction-efficiency High-Dispersion Hybrid Gratings

Jianjie Dong,Cuifang Kuang,Chun Cao,Xiaoming Shen,Xianmeng Xia,Yiwei Qiu,Lingling Guan,Wenji Liu

DOI: https://doi.org/10.1016/j.optcom.2023.130083

IF: 2.4

2024-01-01

Optics Communications

Abstract:Gratings are key components in many optical systems such as spectrometers. Improving their dispersion is very important for their applications, but improving the single-order diffraction efficiency of an ultrahigh dispersion grating is still very challenging. Here, we propose an analytical approach for the design of a new type of grating named hybrid grating, which consists of a subwavelength grating and a non-subwavelength grating. The proposed analytical approach is based on a physical model in which the non-subwavelength grating acts as an ultrathin reflection grating and the subwavelength grating acts as an antireflection coating. Using the rigorous coupled-wave analysis and the finite-difference time-domain method, we numerically demonstrate that multiple hybrid gratings designed at different wavelengths using the proposed analytical approach show a diffraction efficiency of greater than 95 % in the -1st diffraction order for TE-polarized light, an angular dispersion of greater than 0.8 mrad/nm and a deflection angle of greater than 80 degrees. Furthermore, we numerically demonstrate that by using a combined approach to optimize the parameters of a hybrid grating, the diffraction efficiency in the -1st diffraction order for TE-polarized light can be increased to more than 97 % under the condition that the angular dispersion and the deflection angle of the hybrid grating remain unchanged. Our work provides an avenue for rapid design of gratings with high angular dispersion, large deflection angle and high diffraction efficiency.
A New Subdivision Technique For Grating Based On Cmos Microscopic Imaging

Bo Yuan,Huimin Yan,Xiangqun Cao,Bin Lin,袁波,严惠民,曹向群,林斌

IF: 2.56

2007-01-01

Chinese Optics Letters

Abstract:We propose a new subdivision technique directly subdividing the grating stripe by using complementary metal-oxide semiconductor (CMOS) microscopic imaging system combined with image processing. The corresponding optical system, subdivision principle, and image processing methods are illuminated. The relations of systemic resolution to subdivision number, grating period, magnifying power and tilt angle axe theoretically discussed and experimentally checked on the Abbe comparator. The measurement precision for displacement of the proposed subdivision system is tested in the range of 5 mm. and the maximum displacement error is less than 0.4 mu m. The factors contributing to the systemic error are also discussed.
RESEARCH ON THE DIFFRACTION EFFICIENCY OF GRATING FOR THE SECOND SCALAR ANALYSIS METHOD

Fengwen Mi,Yibing Shen,Guoguang Yang

2000-01-01

Abstract:The second scalar analysis method to calculate the diffraction efficiency of grating was described in detail, A simple effective approximation formula to calculate the diffraction efficiency of grating was educed. Diffraction efficiencies were given and compared with scalar results, rigorous vector results.
Eliminating the Longitudinal Piston Error Between Tiled Gratings by Angle Tuning

Yanlei Zuo,Xiaofeng Wei,Xiao Wang,Qihua Zhu,Rui Ren,Zheng Huang,Hongjie Liu,Chuntong Ying

DOI: https://doi.org/10.1364/ol.32.000280

2007-01-01

Abstract:In a tiled-grating system, it is difficult to make two tiled gratings strictly coplanar. We propose and demonstrate for the first time, as far as we know, a simple method by which the longitudinal piston error between two tiled gratings can be reduced below lambda/10, close to the influence of the environmental factors. The alignment precision of the method increases with the tiled-grating system's stability to environmental factors.
Diffraction Property of Tapered Grating

WU Qiong,YANG Jing,YUAN Bo,LIN Bin,QIAN Jin-song

IF: 0.6

2011-01-01

ACTA PHOTONICA SINICA

Abstract:A new tapered grating was designed for precisely subdividing the angle of absolute optical encoder to solve the contradiction between its resolution and size.The diffraction properties of tapered grating were theoretically analyzed and the subdivision principle was illuminated based on the Fraunhofor diffraction theory.Moreover,the deduced theoretical results were verified by the experiments.
The testing and investigation of grating spectral intensity

Bin Lin,Xiaojie Xu,Xiangqun Cao

DOI: https://doi.org/10.1117/12.520417

2004-01-01

Abstract:This paper represents the testing of grating spectral intensity distribution and describes the testing of semi-split beam grating of DVD. Then some methods to improve the stability of the data are introduced.
Diffraction Properties of Transmission Binary Blazed Grating

Hui-Jun Zhou,Qu-Quan Wang

IF: 0.6

2006-01-01

Optica Applicata

Abstract:The properties of binary blazed grating were theoretically analyzed with finite-difference time-domain (FDTD) method. The diffraction efficiencies and diffraction angles of -1, 0, and +1 order for the grating varying with wavelength, grating structure, and the etch depth were studied when the incident angle was 30 degrees. The numerical simulations revealed that the binary blazed grating presented high stability of diffraction efficiencies with wavelength shift.
Precision Analysis of Grating Replicated Mosaic Error Based on the Principle of Fraunhofer

Yuxian Lu,Xiangdong Qi,Haili Yu,Xiaotian Li,Shanwen Zhang,Shan Jiang,Lu Yin

DOI: https://doi.org/10.3788/cjl201643.0508005

2016-01-01

Abstract:Replicated mosaic is an important way to make large size plane diffraction grating in astronomy.Considering cost control and grating development cycle,the mosaic system should be applicable to different parameters of grating and different test wavelengths.At the same time,the accuracy of the mosaic system must match the requirement.The mosaic error theory model is established based on the principle of Fraunhofer far field diffraction and the trend is analyzed and simulated when the wavelength of incident light,diffraction order,grating constant,and incident angle are changed.The variable range of above parameters is designed according to the actual mosaic demand.The mosaic error precision which can satisfy the usage requirement is computed when the grating parameters and detection conditions are changed.The simulation results will make a significant guidance for the replicated mosaic system design.
Experimental Study About A Type of Gratings Interferometer

Zhao　Bo,Yan　Lei,Hao Defu

DOI: https://doi.org/10.3321/j.issn:0254-3087.2001.03.013

2001-01-01

Abstract:A new kind of grating interferometers was discussed in this paper. This interferometer's base element is a piece of reflection cross-grating.Its principle, adjustment, matching of gratings and the major errors were analysised. Some advantages were found. The experiment results show that it will be used widely.
Analysis and Removal of Five-Dimensional Mosaicking Errors in Mosaic Grating

Min Cong,Xiangdong Qi,Jing Xu,Chuan Qiao,Xiaotao Mi,Xiaotian Li,Haili Yu,Shanwen Zhahng,Hongzhu Yu,Bayanheshig

DOI: https://doi.org/10.1364/oe.27.001968

IF: 3.8

2019-01-01

Optics Express

Abstract:Combining the mathematical relationships between the grating wavefront and surfaces with the spatial relationships between the two grating wavefront, a mathematical model of the mosaicking errors is established to mosaic gratings. The five-dimensional mosaicking errors will respectively be calculated and then removed by the adjustment mechanisms. Mosaicking experiments are performed by using two gratings. First, by using zeroth order, the longitudinal offset is calculated and removed. Second, by using the diffraction order, the in-plane angle and grating spacing are calculated and removed, while the tip and tilt angles are calculated and removed. And then a mosaic grating is obtained.
Experimental research on diffractive performance of the rectangular gratings with micron or submicron period

ShiHai Zheng,Dehua Li.,Yansong Chen,Lun Dai

1996-01-01

Abstract:The rectangular gratings with micron or submicron period were developed by using electron lithography and ion itching techniques. Their diffractive performances were studied. The experimental results show that when the period of grating is approaching to the incident wavelength, the diffractive angular spectra exhibit the electromagnetic vector characteristic.
A Study on Length Traceability and Diffraction Efficiency of Chromium Gratings

Lihua Lei,Lijie Liang,Liqin Liu,Yaoqiong Shen,Yuqing Guan,Yujie Zhang,Wenzhe Zou,Chuangwei Guo,Yunxia Fu

DOI: https://doi.org/10.3390/photonics11030233

IF: 2.536

2024-03-05

Photonics

Abstract:Measurement traceability is a prerequisite for achieving accurate and reliable results as well as technical standardization. The period of Chromium (Cr) gratings fabricated by atomic lithography can be directly traced back to natural constants. Applying the Cr grating to grating interferometry can achieve nanometer measurement traceability. This research aims to analyze the diffraction efficiency characteristics of self-traceable Cr gratings to provide a theoretical basis for the fabrication and application of Cr gratings. In this regard, we establish the theoretical model of the laser beam incident angle and grating diffraction efficiency using the rigorous coupled-wave method. Then, we analyze the influence of the laser beam incident angle on grating diffraction efficiency by simulation, verify the accuracy of the theoretical model, and finally build a measurement system for grating diffraction efficiency. Through experiments, we find that the diffraction efficiency of the grating shows a rapid increase to reach a stable maximum value followed by a decrease, when a laser beam with a wavelength of 405 nm is incident on the surface of a self-traceable grating in Transverse Magnetic (TM) polarization and the incident angle changes within an effective range. The experimental results are consistent with the trend of theoretical calculation results.

optics
Error Analysis of Gratings in Optical Pickup Heads

HT Zhang,RZ Cui,M Gong,DZ Zhao,P Yan,WP Jia

DOI: https://doi.org/10.1117/1.1486244

IF: 1.3

2002-01-01

Optical Engineering

Abstract:To achieve precise energy distribution among light beams diffracted by a rough surface-relief grating in optical pickup heads, we model the grating with a scalar theory. The grating is assumed to be a trapezoid shape with different roughnesses for the top and the bottom surfaces. The model includes rectangle, triangle, and sawtooth shapes as special cases. Using this model, we investigate the influence of grating parameters on diffraction efficiencies and deduce Strehl ratios for different surface roughness values. (C) 2002 Society of Photo-Optical Instrumentation Engineers.
Developments of X-Ray Grating Imaging Based on Talbot Interferometry

Han Yueping,Chen Zhiqiang,Zhang Li,Huang Zhifeng,Zhang Ran,Jiang Xiaolei,韩跃平 Han Yueping,陈志强 Chen Zhiqiang,张丽 Zhang Li,黄志峰 Huang Zhifeng,张冉 Zhang Ran,姜晓磊 Jiang Xiaolei

DOI: https://doi.org/10.3788/LOP49.070002

2012-01-01

Laser & Optoelectronics Progress

Abstract:We present a review of X-ray grating-based imaging based on interferometry,including the recent developments in instrumentation and methodology.The classic X-ray grating-based imaging based on Talbot-Lau interferometry is introduced in terms of its general principles and system configuration,as well as the multiple information(i.e.,attenuation,refraction and small-angle scattering information) retrieval algorithms.Up-to-date analyses and optimizations of this method are presented,including approaches to relax the high positioning resolution requirement in phase stepping process and attempts on large-field-of-view imaging with high-resolution gratings.Secondly,we introduce the latest developments in two-dimensional grating-based imaging and time-resolved four-dimensional grating-based imaging.An outlook of X-ray grating-based imaging is given.
Exploring the structural color of micro-nano composite gratings with FDTD simulation and experimental validation

Zaizhen Lou,Yongda Yan,Jiqiang Wang,Aoxiang Zhang,Hailong Cui,Chen Li,Yanquan Geng

DOI: https://doi.org/10.1364/oe.510400

IF: 3.8

2024-01-11

Optics Express

Abstract:Zaizhen Lou, Yongda Yan, Jiqiang Wang, Aoxiang Zhang, Hailong Cui, Chen Li, Yanquan Geng The significance of micro-nano composite gratings (MNCGs) resides in their applications, including optical devices, sensors, and ... [Opt. Express 32, 2432-2451 (2024)]

optics
Research on the Summarization of Nanometrology Measuring Based on Grating

MA Xiushui,FEI Yetai,CHEN Xiaohuai,LI Guihua,QUAN Jiping

DOI: https://doi.org/10.3969/j.issn.1005-2402.2006.09.023

2006-01-01

Abstract:This paper analyses the measuring principles of measuring system of dual grating, measuring system of blazed grating, nanometrology measuring system of grating based on error correction methods and nanometrology measuring system of grating based on two times Moire' fringe. And this paper introduces the key technology for further research on nanometrology measuring based on grating.
Surface-relief Gratings with Sharp Edges: Improvement of the Convergence of the Coordinate Transformation Method

Lifeng Li

DOI: https://doi.org/10.1364/domo.1996.jtub.13

1996-01-01

Abstract:Since it was first proposed one and a half decades ago, the coordinate transformation method of Chandezon et al.1 (the C method) for analyzing surface-relief gratings has gone through many stages of improvement and extension.2-10 By now, it is truly one of the most efficient and versatile theoretical tools for modeling gratings of arbitrary permittivity and (reasonably) arbitrary profiles. The most distinctive features of the C method, not shared with any other rigorous grating methods, are its virtually uniform convergence with respect to the incident polarization (TE, TM, or conical) and the medium permittivity (dielectric or metal), and its perfect suitability for modeling multilayer-coated gratings.
Theory Study of a New Nanometrology Grating

Xiushui Ma,Yetai Fei,Xiaohuai Chen,Jing Zhao

DOI: https://doi.org/10.3321/j.issn:0254-3087.2006.02.012

2006-01-01

Abstract:In order to develop metrological grating with nanomeasurement precision, which has simple structure, high performance on anti-interfere, the measurement principle of nanomeasurement precision grating is analyzed based on two times' Moiré fringe, its resolution can achieve 5.40 × 10-10 m, and the measurement precision can achieve nanometer through simulated calculation. Furthermore, it discusses the effects of two times'Moiré fringe when the indicator grating and the scales grating are not parallel.
Method to Mosaic Gratings That Relies on Analysis of Far-Field Intensity Patterns in Two Wavelengths

Yao Hu,Lijiang Zeng,Lifeng Li

DOI: https://doi.org/10.1016/j.optcom.2006.08.008

IF: 2.4

2007-01-01

Optics Communications

Abstract:We propose an experimental method to coherently mosaic two planar diffraction gratings. The method uses a Twyman–Green interferometer to guarantee the planar parallelism of the two sub-aperture gratings, and obtains the in-plane rotational error and the two translational errors from analysis of the far-field diffraction intensity patterns in two alignment wavelengths. We adjust the relative attitude and position of the two sub-aperture gratings to produce Airy disk diffraction patterns in both wavelengths. In our experiment, the repeatability of in-plane rotation adjustment was 2.35μrad and that of longitudinal adjustment was 0.11μm. The accuracy of lateral adjustment was about 2.9% of the grating period.

Recent Progress of the Tiled-Grating Research

Theoretical and experimental study of grating tiling

Design of Large-Deflection-angle High-Diffraction-efficiency High-Dispersion Hybrid Gratings

A New Subdivision Technique For Grating Based On Cmos Microscopic Imaging

RESEARCH ON THE DIFFRACTION EFFICIENCY OF GRATING FOR THE SECOND SCALAR ANALYSIS METHOD

Eliminating the Longitudinal Piston Error Between Tiled Gratings by Angle Tuning

Diffraction Property of Tapered Grating

The testing and investigation of grating spectral intensity

Diffraction Properties of Transmission Binary Blazed Grating

Precision Analysis of Grating Replicated Mosaic Error Based on the Principle of Fraunhofer

Experimental Study About A Type of Gratings Interferometer

Analysis and Removal of Five-Dimensional Mosaicking Errors in Mosaic Grating

Experimental research on diffractive performance of the rectangular gratings with micron or submicron period

A Study on Length Traceability and Diffraction Efficiency of Chromium Gratings

Error Analysis of Gratings in Optical Pickup Heads

Developments of X-Ray Grating Imaging Based on Talbot Interferometry

Exploring the structural color of micro-nano composite gratings with FDTD simulation and experimental validation

Research on the Summarization of Nanometrology Measuring Based on Grating

Surface-relief Gratings with Sharp Edges: Improvement of the Convergence of the Coordinate Transformation Method

Theory Study of a New Nanometrology Grating

Method to Mosaic Gratings That Relies on Analysis of Far-Field Intensity Patterns in Two Wavelengths