Research on the Summarization of Nanometrology Measuring Based on Grating

MA Xiushui,FEI Yetai,CHEN Xiaohuai,LI Guihua,QUAN Jiping
DOI: https://doi.org/10.3969/j.issn.1005-2402.2006.09.023
2006-01-01
Abstract:This paper analyses the measuring principles of measuring system of dual grating, measuring system of blazed grating, nanometrology measuring system of grating based on error correction methods and nanometrology measuring system of grating based on two times Moire' fringe. And this paper introduces the key technology for further research on nanometrology measuring based on grating.
What problem does this paper attempt to address?