Abstract:The planer grating with large area plays an important role in the optical encoder for large stroke measurement. Compared with the conventional fabrication techniques such as interference lithography and mechanically ruling for large-area manufacture, splicing small-area grating units into a large integral mosaic grating is promising to reduce the technical difficulty and time-consumption. We proposed a novel grating splicing method to construct large-area mosaic grating applicable for optical encoder. The splicing apparatus is capable of providing four degree-of-freedom including one out-of-plane straight motion (Delta Z) and three rotation motions (Delta theta(x), Delta theta(y), Delta theta(z)) for mechanically adjusting the grating units. The diffracted beams from the spliced gratings are utilized to guide the adjustment, i.e., zero-order diffracted beams for Delta z, Delta theta(x), Delta theta(y) and first-order diffracted beams for Delta theta(z), respectively. The diffracted-beams orientations of the first grating were adopted as the basic reference, and the posture of the other gratings are continuously adjusted by matching the position of the diffracted beams. Five grating units with 20 x20 mm(2) area and 1 lam period were spliced together. Finally, a coordinate measuring machine was utilized to evaluate the flatness of the mosaic gratings, showing a good flatness as small as similar to 60 mu m. It is demonstrated that our proposed splicing method is promising to achieve good flatness of mosaic grating potentially applied for large-stroke optical encoder.

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