A grating displacement sensor : instead of the moiré fringes, the grating line are subdivided directly by CCD

H. Zhuang,He Shurong,Xiao Zongyang
Abstract:Different from the traditional way of subdividing the moire fringe that needs complex subsequent circuits, we adopt a linear CCD array to subdivide the grating line directly. Because of the CCD's high sensitivity, consistency and the amount of pixels, the interval between two neighboring lines of the grating can be measured and the subdivision factor is up to thousands of times. Therefore, our device can attain high resolution with limited cost. The circuit is also much simpler than before since CCD driver itself completes the subdividing and digitizing functions. The practical device's precision is better than 0.1 μm and the linearity is better than 0.99.
Engineering,Physics
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