A High-Resolution Displacement Sensor Based on a Grating Interferometer with the Phase Modulation Technique

Shuangshuang Zhao,Changlun Hou,Juan Zhang,Jian Bai,Guoguang Yang

DOI: https://doi.org/10.1088/0957-0233/23/10/105102

IF: 2.398

2012-01-01

Measurement Science and Technology

Abstract:A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique is demonstrated in this paper. The grating interferometer is formed with a grating and a mirror, which is fixed on a piezoelectric translator to generate phase modulation. The detected signal is intensity-modulated and processed with a lock-in amplifier for demodulation. Experimental results show that this displacement sensor has a displacement sensitivity of 19.8 mV nm(-1) and a high-resolution displacement detection of 0.05 nm in the linear region.