Sub-wavefront Slope Measurement Based on Talbot Effect Moiré Fringe Technology

HOU Chang-lun,XU Jian-feng,BAI Jian,YANG Guo-guang
DOI: https://doi.org/10.3969/j.issn.1003-501x.2007.11.013
2007-01-01
Abstract:In order to complete wavefront accurate measurement of large aperture long focal lens, a method for sub-wavefront slope of large aperture lens measurement based on Talbot effect moire fringe technology is presented. When a Ronchi grating is illuminated by a sub-aperture beam, Talbot image can be obtained at periodic distance behind the Ronchi grating. If another Ronchi grating is put at the location of the Talbot image, moire fringe will appear behind this grating. Moire fringe moves sensitively when the slope of the illuminating sub-aperture beam changes slightly, so the slope of sub-aperture beam can be measured accurately by counting the number of the shifted moire fringe. The formula of calculating the angle of sub-wavefront slope from the shifted moire fringe numbers is derived. The experiment data is consistent with the theoretical analysis very well. This method can be applied to the sub-wavefront slope testing with high accuracy.
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