S4-4 angle measurement method based on the duel gratings combination

Yanfei Dong,Junjun Ye,Xiaotong Li,Xiangqun Cao
2010-01-01
Abstract:The present study is focused on the angle measurement with the combination of coarse and fine gratings to simplify the structure of measuring instruments at the same accuracy. A series of experiments were completed by using the He-Ne laser and the gratings with the periods of 83.37um and 6.325um, which shows that the accuracy of the angle measurement is better than 2. The experimental results indicate that the proposed method is avail to simplify the instrument and improve the accuracy.
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