Dual-comb based angle measurement method using a grating and a corner cube combined sensor

Zhou Siyu,Zhu Zebin,Xiong Shilin,Ni Kai,Zhou Qian,Wu Guanhao

DOI: https://doi.org/10.1364/cleopr.2018.w4f.5

2018-01-01

Abstract:We present an angle measurement method of dual-comb interferometry which uses a grating and a comer cube combined sensor. The precision is better than 10 arc-seconds within 3000 arc-seconds and 30 arc-seconds within 7800 arc-seconds.

What problem does this paper attempt to address?

Dual-Comb Based Two-Dimensional Angle Measurement System

Siyu Zhou,Vunam Le,Kai Ni,Qian Zhou,Guanhao Wu

DOI: https://doi.org/10.1364/cleo_si.2020.sm2n.6

2020-01-01

Abstract:We present a dynamic angle measurement method based on dual-comb interferometry that can reach a precision of 0.08 arc-second with 1 kHz response speed. This method can also be applied at long stand-off distances.
High-Accuracy Method for Measuring Two-Dimensional Angles of A Linear Guideway

Cuifang Kuang,En Hong,Qibo Feng

DOI: https://doi.org/10.1117/1.2740137

IF: 1.3

2007-01-01

Optical Engineering

Abstract:A single method for simultaneously measuring 2-D rotational angles is proposed by using a collimation laser. Compared with the traditional autocollimator measurement method, the proposed method can also be applied to longer distance and higher precision angular measurement. The 2-D angular drift of the reference datum beam is suppressed by a factor of 10 via expansion. A traditional single lens in front of the detector is replaced by combination lenses to increase the sensitivity and compactibility. The measurement principle of the 2-D angles is also analyzed. The feasibility and stability of the presented system are verified by comparison with the Renishaw ML10 laser interference measuring system. The experimental results show that the linear correlativity is 0.99999 and the point-to-point standard deviation error is less than +/- 0.2 arcsec in a +/- 60-arcsec range and 2000-mm distance. This proposal is most advantageous for simultaneous long distance and high accuracy of 2-D angular errors measurement of a linear guide manner. (C) 2007 Society of Photo-Optical Instrumentation Engineers.
S4-4 angle measurement method based on the duel gratings combination

Yanfei Dong,Junjun Ye,Xiaotong Li,Xiangqun Cao

2010-01-01

Abstract:The present study is focused on the angle measurement with the combination of coarse and fine gratings to simplify the structure of measuring instruments at the same accuracy. A series of experiments were completed by using the He-Ne laser and the gratings with the periods of 83.37um and 6.325um, which shows that the accuracy of the angle measurement is better than 2. The experimental results indicate that the proposed method is avail to simplify the instrument and improve the accuracy.
Radial Displacement Measurement Method by Using a Grating-Corner-Cube Sensor Based on Dual-Comb Spectroscopy

Chen Lin,Siyu Zhou,Yuxuan Ma,Yuetang Yang,Liheng Shi,Lin Li,Ding Yuan,Jian Ding,Guanhao Wu

DOI: https://doi.org/10.1364/cleo_at.2023.jtu2a.29

2023-01-01

Abstract:We present a method to measure radial displacement based on dual-comb spectroscopy by using a grating-corner-cube sensor, which can reach a repeatability precision of 2.77 μm, along with ~1.1 kHz repetition rate difference.
Dual-comb Spectroscopy Resolved Three-Degree-of-freedom Sensing

Siyu Zhou,Vunam Le,Shilin Xiong,Yuetang Yang,Kai Ni,Qian Zhou,Guanhao Wu

DOI: https://doi.org/10.1364/prj.412898

IF: 7.6

2021-01-01

Photonics Research

Abstract:Precise and fast determination of position and orientation, which is normally achieved by distance and angle measurements, has broad applications in academia and industry. We propose a dynamic three-degree-of-freedom measurement technique based on dual-comb interferometry and a self-designed grating-corner-cube (GCC) combined sensor. Benefiting from its unique combination of diffraction and reflection characteristics, the absolute distance, pitch, and yaw of the GCC sensor can be determined simultaneously by resolving the phase spectra of the corresponding diffracted beams. We experimentally demonstrate that the method exhibits a ranging precision (Allan deviation) of 13.7 nm and an angular precision of 0.088 arcsec, alongside a 1 ms reaction time. The proposed technique is capable of precise and fast measurement of distances and two-dimensional angles over long stand-off distances. A system with such an overall performance may be potentially applied to space missions, including in tight formation-flying satellites, for spacecraft rendezvous and docking, and for antenna measurement as well as the precise manufacture of components including lithography machines and aircraft-manufacturing devices.
Ultra-precision angle sensor with a mode-locked laser source

Shuhei MADOKORO,Yuki SHIMIZU,Yuan-Liu CHEN,Wei GAO

DOI: https://doi.org/10.1299/jsmelem.2017.9.076

2017-01-01

Abstract:This paper presents a new optical angle sensor, in which a mode-locked laser referred to as an optical frequency comb is employed as the light source. Highly-stable carrier frequency of the optical frequency comb is expected to improve the sensor stability. This angle sensor is designed based on laser autocollimation method, and utilizes the chromatic dispersion of an objective lens to detect angular displacement of a measurement target. A detail of the proposed method is described, followed by some experimental results with the developed prototype optical sensor.
A New Optical Angle Measurement and Compensation

SONG Ji-dong,ZHANG Wan-zhen,LIN Bin

DOI: https://doi.org/10.3788/gzxb20114003.0354

2011-01-01

Abstract:In the process of cutting quartz,machining errors often cause two surfaces unparallel,which will can influence on the judgment to its crystal orientation.The angle measurement of full-automated x-ray sorting machine was analyzed.The light spots deflected by quartz were detected by position sensitive detector,and relational expression between points position sensitive detector detected in the coordination and angles between top and bottom surfaces was deduced.And,the shapes of the light spots on the position sensitive detector in different incident angles and thicknesses were studied.It was found that similar linear relationship exists between height differences at coordination axis on position sensitive detector.When the incident angle is 20°,the norm of residual has the smallest value of 5.306 2×10-6 mm.The system resolution and measurement range are 1.033″ and 15′ respectively.
Grating-Corner-Cube-Based Roll Angle Sensor

Siyu Zhou,Vunam Le,Qinggai Mi,Guanhao Wu

DOI: https://doi.org/10.3390/s20195524

IF: 3.9

2020-09-27

Sensors

Abstract:This paper presents a specifically designed grating-corner-cube sensor for precise roll angle measurements. Owing to the diffraction characteristics of the transmission grating and reflection characteristics of the corner cube, two spatially separated parallel beams are naturally constructed. Through differential detection of the positions of two parallel beams, we experimentally demonstrate the possibility of a precise roll angle measurement at a high refresh rate. A performance evaluation of the proposed technique indicates a stability of 0.46 arcsec over 5 min. Compared with a commercial autocollimator over a range of 500 arcsec, the residuals are maintained within ±2 arcsec with a standard deviation of 1.37 arcsec. Furthermore, a resolution of 0.8 arcsec can be achieved using the proposed method. The developed compact roll angle sensor has potential applications in academic and industrial fields.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Two-dimensional Surface Profile Imaging Technique Based on a Double-Grating Frequency Shifter

KW Wang,LJ Zeng

DOI: https://doi.org/10.1364/ao.44.004625

IF: 1.9

2005-01-01

Applied Optics

Abstract:A two-dimensional surface profile imaging technique that uses a low-coherence heterodyne interferometer is proposed. A double-grating frequency shifter was used in a tandem interferometer to provide the achromatic frequency shift for low-coherence light. A chopper, together with a processing circuit, was implemented to modulate the interference fringes. The surface profile was measured from the interference fringes taken by a CCD camera using a five-step method. The uncertainty in the displacement measurement is 0.34 microm for a displacement range of 43 microm. The surface profile of a glass sample with low effective reflectivity was acquired.
High-Precision Attitude Angle Measuring System Based on Talbot Interferometry

Juan Du,Jian Bai,Xiao Huang,Yujie Luo,Yupeng Luo

DOI: https://doi.org/10.1117/12.2285187

2017-01-01

Abstract:A traditional tracking device obtain the attitude angle by analyzing the spots position on photodetector. However, the attainable angular measurement accuracy depends on the field of view (FOV), number of pixels of the photodetector and the centroiding algorithm. In this paper, we present a high-precision attitude angle measuring system based on Talbot interferometry using cross-gratings and four wedge plates, which can acquire the real-time change of incident angle along two axis. The specific structure of the system is introduced, and the formula for calculating the relative angle is derived. The tracking accuracy is analyzed to be better than 0.2 arcsecond, which is dependent on the grating period, the distance between the two gratings and the gray scale of image. The Simulation results show that the RMS error of relative angle is better than 0.1 arcsecond both in x and y direction.
Absolute Angular Position Measurement by Dual-Comb Spectroscopy of an Autocollimation Diffracted Beam

Siyu Zhou,Ruilin Jiang,Ruixue Zhang,Liheng Shi,Di Zhang,Guanhao Wu

DOI: https://doi.org/10.1364/ol.479328

IF: 3.6

2023-01-01

Optics Letters

Abstract:The dual-comb technique is a powerful tool in industrial inspection and scientific research and is capable of realizing ultrahigh-resolution and fast broadband spectral measurements. We propose an absolute angular-position measurement method based on dual-comb spectroscopy. With a simple layout, the absolute angular position can be naturally determined through the traceable and wide-amplitude spectra of the autocollimation diffracted beams of the target grating. We experimentally demonstrate that a precision of 0.12 arcsec in the dynamic range of approximately 6660 arcsec, along with a 1 kHz repetition rate difference, is achieved. Compared with a commercial autocollimator, over 1000 arcsec, the comparison residuals are kept within ±0.3 arcsec.
Two-dimensional angle measurement with sub-arcsecond precision and MHz update rate using heterodyne interferometry with optical frequency comb

Chen Lin,Siyu Zhou,Liheng Shi,Yuetang Yang,Guanhao Wu

DOI: https://doi.org/10.1364/OL.510645

2024-02-01

Abstract:Heterodyne interferometry is a powerful tool for achieving high precision and fast measurement. We developed an angle measurement system based on heterodyne interferometry by combining discrete equal-spacing longitudinal modes of optical frequency comb with an acousto-optic modulator. Using a self-designed grating-corner-cube sensor, this method can achieve a two-dimensional angle measurement with sub-arcsecond accuracy and megahertz (MHz) update rate. We experimentally demonstrate a precision of 0.073 arcsec under a 3 MHz update rate, and comparison residuals are kept within 0.063 arcsec over 300 arcsec when compared to a piezo stage. In the dynamic measurement of a 40 Hz frequency, the continuous sinusoidal motion of 0.05 arcsec can be clearly distinguished and reconstructed.
A compact 2D micro-angle sensor

Mengdong Lian,Bingfeng Ju

2010-01-01

Abstract:This paper presents a compact two-dimensional micro-angle sensor for measuring surface profiles and motions. The sensor based on the principle of laser autocollimation, consists of a laser diode as a light source and a quadrant photodiode as a position-sensing device. The laser beam is collimated to a thin parallel beam which makes it possible to detect small variation of the target mirror mounted on the precision stage. The sensitivity of the angle sensor does not rely on the focal length of the objective lens, which makes it probable to realize the compact volume. The quadrant photodiode has two-dimensional position-detecting capability, therefore, the angle sensor can detect two-axis tilt simultaneously. The micro-angle sensor has a dimension of 25×20×13mm. The detection range is ±1200 arc-seconds and the resolution is 0.1 arc-second. Comparison experiments with an autocollimator are carried out, which testify the validity of the new compact 2D micro-angle sensor.
Absolute Angular Position Sensing by Dual-Comb Autocollimator

Siyu Zhou,Ruilin Jiang,Ruixue Zhang,Jie Liu,Yawen Cai,Jiuli Liu,Guanhao Wu

DOI: https://doi.org/10.1364/cleo_at.2022.atu5k.7

2022-01-01

Abstract:We propose a dynamic absolute angular position measurement method based on dual-comb spectroscopy combined with laser auto-collimation technique. The method exhibits a dynamic angle precision of 0.12 arcsec in the range of ~6660 arcsec.
Combined Displacement and Angle Sensor with Ultra-High Compactness Based on Self-Imaging Effect of Optical Microgratings

Mengdi Zhang,Hao Yang,Qianqi Niu,Xuye Zhang,Jiaan Yang,Jiangbei Lai,Changjiang Fan,Mengwei Li,Chenguang Xin

DOI: https://doi.org/10.3390/s24030908

IF: 3.9

2024-01-31

Sensors

Abstract:In this paper, an ultracompact combined sensor for displacement and angle-synchronous measurement is proposed based on the self-imaging effect of optical microgratings. Using a two-grating structure, linear and angular displacement can be measured by detecting the change of phase and amplitude of the optical transmission, respectively, within one single structure in the meantime. The optically transmitted properties of the two-grating structure are investigated in both theory and simulation. Simulated results indicate that optical transmission changes in a sinusoidal relationship to the input linear displacement. Meanwhile, the amplitude of the curve decreases with an input pitch angle, indicating the ability for synchronous measurement within one single compact structure. The synchronous measurement of the linear displacement and the angle is also demonstrated experimentally. The results show a resolution down to 4 nm for linear displacement measurement and a maximum sensitivity of 0.26 mV/arcsec within a range of ±1° for angle measurement. Benefiting from a simple common-path structure without using optical components, including reflectors and polarizers, the sensor shows ultra-high compactness for multiple-degrees-of-freedom measuring, indicating the great potential for this sensor in fields such as integrated mechanical positioning and semiconductor fabrication.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Synthetic-Wavelength-Based Dual-Comb Interferometry for High-Speed and High-Precision Distance Measurement

Zebin Zhu,Kai Ni,Qian Zhou,Guanhao Wu

DOI: https://doi.org/10.1364/cleo_at.2018.atu3i.4

2018-01-01

Abstract:We propose a dual-comb ranging system based on synthetic-wavelength interferometry. It can realize absolute distance measurement with 2.7m ambiguity range, 3nm precision within 10ms averaging time.
Multi-Pulse Sampling Dual-Comb Interferometer

Siyu Zhou,Kai Ni,Qian Zhou,Guanhao Wu

DOI: https://doi.org/10.1364/cleo_at.2020.af3m.4

2020-01-01

Abstract:We present a multi-pulse sampling dual-comb interferometer that realizes the multiplication of cross-correlation interferograms and improves the ranging precision. The experimental results demonstrate that a precision of 3.1nm is obtained with 15ms averaging time.
Dual-Comb Reciprocal Temporal Scanning for Absolute Distance Measurement

Hongyuan Zhang,Xuejian Wu,Haoyun Wei,Yan Li

DOI: https://doi.org/10.1364/cleo_si.2015.sf2l.4

2015-01-01

Abstract:Pulse trains from dual combs with different repetition rates are coupled and directed onto a target for simultaneous absolute distance measurement. Non-ambiguity range extension is immune to drift and accuracy is about 100 nm.
Simultaneous Measurement of Refractive Index and Lens Surface Spacing in Optical Systems by Dual-Comb Ranging

Chen Lin,Siyu Zhou,Ruixue Zhang,Guanhao Wu

DOI: https://doi.org/10.1364/oe.471060

2022-01-01

Abstract:We present a method to measure the refractive index and lens surface spacing in optical systems simultaneously by dual-comb ranging. The repeatability precision of thickness and refractive index is better than 0.18 μm and 1.6×10 -4 .
3D Shape Measurement for a Discontinuous Object Based on a Dualfrequency Composite Grating

武迎春,曹益平,肖焱山

DOI: https://doi.org/10.16136/j.joel.2012.12.003

2012-01-01

Abstract:The composite Fourier transform profilometry (CFTP) has enlarged the measuring range by three times by using of the phase-shifting technique. When it is used to measure the discontinuous object,the single modulation frequency can't satisfy the different frequencies requirement for phase unwrapping and phase calculation accuracy. A dual-frequency composite grating which contains two modulation frequencies is proposed in this paper. Compared with the CFTP, the phase calculation accuracy is improved because the lower frequency is used to guide the unwrapping process of the higher frequency; the overlapping degree of Fourier spectrum between the AC components in the adjacent carrier channels is lowered; the measuring range is enlarged three times as the n shifting technique is used. Both numerical simulation and experiment have verified the feasibility and validity of the proposed method.

Dual-comb based angle measurement method using a grating and a corner cube combined sensor

Dual-Comb Based Two-Dimensional Angle Measurement System

High-Accuracy Method for Measuring Two-Dimensional Angles of A Linear Guideway

S4-4 angle measurement method based on the duel gratings combination

Radial Displacement Measurement Method by Using a Grating-Corner-Cube Sensor Based on Dual-Comb Spectroscopy

Dual-comb Spectroscopy Resolved Three-Degree-of-freedom Sensing

Ultra-precision angle sensor with a mode-locked laser source

A New Optical Angle Measurement and Compensation

Grating-Corner-Cube-Based Roll Angle Sensor

Two-dimensional Surface Profile Imaging Technique Based on a Double-Grating Frequency Shifter

High-Precision Attitude Angle Measuring System Based on Talbot Interferometry

Absolute Angular Position Measurement by Dual-Comb Spectroscopy of an Autocollimation Diffracted Beam

Two-dimensional angle measurement with sub-arcsecond precision and MHz update rate using heterodyne interferometry with optical frequency comb

A compact 2D micro-angle sensor

Absolute Angular Position Sensing by Dual-Comb Autocollimator

Combined Displacement and Angle Sensor with Ultra-High Compactness Based on Self-Imaging Effect of Optical Microgratings

Synthetic-Wavelength-Based Dual-Comb Interferometry for High-Speed and High-Precision Distance Measurement

Multi-Pulse Sampling Dual-Comb Interferometer

Dual-Comb Reciprocal Temporal Scanning for Absolute Distance Measurement

Simultaneous Measurement of Refractive Index and Lens Surface Spacing in Optical Systems by Dual-Comb Ranging

3D Shape Measurement for a Discontinuous Object Based on a Dualfrequency Composite Grating