Measurement of Period Difference in Grating Pair Based on Analysis of Far-Field Intensity Patterns

Chao Guo,Lijiang Zeng
DOI: https://doi.org/10.1016/j.optcom.2008.03.056
IF: 2.4
2008-01-01
Optics Communications
Abstract:We propose and demonstrate an experimental method for measuring the period difference in grating pair. The method uses the compensating relationship between line-density difference and the Littrow-angle difference of gratings. Far-field intensity patterns of 0th- and −1st-orders diffraction beams are monitored for alignment during the angle measurement. For a pair of ∼0.676μm period gratings, the relative period difference was measured to be 798.4×10−6 with a standard deviation of 2.0×10−6.
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