Angle Measurement with Determining the Direction of Angle Rotation Based on Laser Self-Mixing Interferometry

CHEN Chun,QI Pan,ZHONG Jin-gang

DOI: https://doi.org/10.16136/j.joel.2011.03.011

2011-01-01

Abstract:Due to the fact that present angle measurement methods based on laser self-mixing interferometry(SMI) cannot determine the direction of angle rotation,we present an angle measurement method based on laser self-mixing interferometry and surface plasmon resonance(SPR) to solve this problem.The method determined the direction of angle rotation by the variation of related light intensity,and measured the rotation angle by the precalibrated correlation between the related light intensity and rotation angle.In order to verify the method,we constructed a rotation angle measurement system for the precision rotation stage.The experimental results show that our method has high precision and can also determine the direction of angle rotation simultaneously.