Abstract:The laser alignment technique is widely used in the measurement of straightness due to its unique capabilities of non-contact detection, fast response and high accuracy. By coupling the laser beam into a single-mode fiber, traditional alignment method can be greatly improved, since the emitting beam from the fiber basically won’t be affected by the variation of the incident intensity distribution. However, such method still suffers from errors caused by the vibration of the emitting fiber end and air turbulence. In this paper, the traditional alignment reference, which is the centroid of the intensity distribution, is replaced by center of the dark spot in a diffraction pattern, by adding a spiral phase plate (SPP) into the optical path. The center of the dark spot is proved to be stationary when the laser beam drifts. The far-field diffraction model of SPP is theoretically analyzed in detail. In the calibration experiments, the detected position data of the scanned CCD is highly linear with a correlation coefficient of 0.99999. The system is guaranteed with outstanding stability by a series of experiments, in which the standard deviation of the x and y coordinates are respectively only 7.0% and 33.7% in short-term tests and 20.3% and 25.3% in long-term tests. With simple configuration, the proposed system demonstrates satisfying performance in laser alignment.

A Novel Method to Simultaneously Measure the Straightness

A Novel Method To Enhance The Sensitivity For Two-Degrees-Of-Freedom Straightness Measurement

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Simultaneous Measuring Method Of Linear Guide Geometric Errors In Four-Degrees Of Freedom

Study of the Method for Measuring Four-Degree-of-Freedom Geometric Errors of a Linear Stage

Novel Enhancing Resolution Method for Measurement Straightness Error

Development of Equipment for Simultaneously Measuring Two-dimensional Rotation Angles of the Linear Guide Track

Four Degree-Of-Freedom Geometric Error Measurement System with Common-Path Compensation for Laser Beam Drift

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Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide.

High-Accuracy Method for Measuring Two-Dimensional Angles of A Linear Guideway

Mathematic Model of Simultaneously Measuring Six-dimensional Parameters by Laser

Measuring Straightness Method with Common Path Compensation for Laser Drift

A Systemic Model for Simultaneously Measuring Three dimensional Rotation Angles of the Linear Guide Track [J]

Straightness Measurement Based On Phase Sensitive Detection Technique

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Straightness/coaxiality measurement system with transverse Zeeman dual-frequency laser

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Simultaneous measurement of the straightness error and its position using a modified Wollaston-prism-sensing homodyne interferometer

High-precision laser alignment technique based on spiral phase plate

Adaptive straightness measurement system with dual-frequency laser