Novel Enhancing Resolution Method for Measurement Straightness Error

匡翠方,冯其波,张斌,张志峰,陈士谦
DOI: https://doi.org/10.3321/j.issn:1005-0086.2008.07.020
2008-01-01
Abstract:A novel optical method for enhancing the measurement sensitivity of straightness error of a moving stage is proposed based on collimating laser.The sensitivity of the straightness measurement can be improved by a factor of 8 compared with the movement of the detector itself via using multi-reflection and combination lenses.The measuring principle of the straightness is analyzed.The comparison experiments using Renishaw ML10 laser interference measurement system have been carried out.The experimental results show that the linear correlativity of two-dimensional straightness measurement errors is about 0.9997 and the standard deviation error of the point-to-point is better than 0.1 μm in a ±100 μm range.
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