The testing and investigation of grating spectral intensity

Bin Lin,Xiaojie Xu,Xiangqun Cao

DOI: https://doi.org/10.1117/12.520417

2004-01-01

Abstract:This paper represents the testing of grating spectral intensity distribution and describes the testing of semi-split beam grating of DVD. Then some methods to improve the stability of the data are introduced.

What problem does this paper attempt to address?

A New Subdivision Technique For Grating Based On Cmos Microscopic Imaging

Bo Yuan,Huimin Yan,Xiangqun Cao,Bin Lin,袁波,严惠民,曹向群,林斌

IF: 2.56

2007-01-01

Chinese Optics Letters

Abstract:We propose a new subdivision technique directly subdividing the grating stripe by using complementary metal-oxide semiconductor (CMOS) microscopic imaging system combined with image processing. The corresponding optical system, subdivision principle, and image processing methods are illuminated. The relations of systemic resolution to subdivision number, grating period, magnifying power and tilt angle axe theoretically discussed and experimentally checked on the Abbe comparator. The measurement precision for displacement of the proposed subdivision system is tested in the range of 5 mm. and the maximum displacement error is less than 0.4 mu m. The factors contributing to the systemic error are also discussed.
Diffraction Property of Tapered Grating

WU Qiong,YANG Jing,YUAN Bo,LIN Bin,QIAN Jin-song

IF: 0.6

2011-01-01

ACTA PHOTONICA SINICA

Abstract:A new tapered grating was designed for precisely subdividing the angle of absolute optical encoder to solve the contradiction between its resolution and size.The diffraction properties of tapered grating were theoretically analyzed and the subdivision principle was illuminated based on the Fraunhofor diffraction theory.Moreover,the deduced theoretical results were verified by the experiments.
The Method for Measuring the Groove Density of Variable-Line-space Gratings with Elimination of the Eccentricity Effect.

Qingbo Wang,Zhengkun Liu,Huoyao Chen,Yu Wang,Xiaolong Jiang,Shaojun Fu

DOI: https://doi.org/10.1063/1.4908138

IF: 1.6

2015-01-01

Review of Scientific Instruments

Abstract:To eliminate the eccentricity effect, a new method for measuring the groove density of a variable-line-space grating was adapted. Based on grating equation, groove density is calculated by measuring the internal angles between zeroth-order and first-order diffracted light for two different wavelengths with the same angle of incidence. The measurement system mainly includes two laser sources, a phase plate, plane mirror, and charge coupled device. The measurement results of a variable-line-space grating demonstrate that the experiment data agree well with theoretical values, and the value of measurement error (ΔN/N) is less than 2.72 × 10(-4).
A New System for Measuring the Diffraction Efficiency of Large Aperture Gratings

Xiaowei Zhou,Xiao Wang,Zhengkun Liu,Xiangdong Xu,Shaojun Fu

DOI: https://doi.org/10.1117/12.866282

2010-01-01

Abstract:A simple and new system for measuring the diffraction efficiency of large aperture gratings at littrow angle is established in this paper. The reference grating Po, double beams and timer with shutter have been draw into the system for eliminating the impact of polarization and stray light, fluctuation of incident light, and the fatigue of photodetector. A program is designed to scan, measure and calculate the diffraction efficiency of the gratings automatically. The diffraction efficiency accuracy measured for the gratings is increased by similar to 1% with this system. To achieve more measured accuracy, additional beam of reflection light should be imported.
Performance of a Grating Groove Density Measuring System by Diffraction Method

陈锵,胡中文,余小江,高家法,王秋平,王琪民

DOI: https://doi.org/10.3321/j.issn:0253-3219.2004.01.002

2004-01-01

Nuclear Techniques

Abstract:A grating groove spacing measurement system is established and checked by a sample grating. By detailed error analysis and error sources control, small spacing variation of either plane or concave grating can be determined with accuracy of ΔN/N=2×10~(-4). It is an efficient grating spacing measurement tool for the variable spacing grating as well as the constant spacing grating at NSRL.
INVESTIGATION ON THE SPECTRAL PROPERTIES OF GRATINGS BASED ON FDTD METHOD

Yuchun Gou,Yimin Xuan,HAN Yu-Ge,LI Qiang

2011-01-01

Journal of Engineering Thermophysics

Abstract:Based on the Finite-Difference Time-Domain(FDTD) method,the perfectly matched layer (SAC-PML) absorbing boundary conditions(ABCs) combined with periodic boundary conditions (PBCs) were applied to the grating numerical model.Numerical calculations of spectral properties of the grating and smooth-surface structures were carried out.Absorptance of these two structures was obtained when the TM wave was used as the incident wave,and the metallic grating-coupled surface plasmon polarizations(SPPs) and the microcavity mode were discussed.The results indicate that,the absorptance of grating structure can be enhanced significantly compared with that of smooth-surface structure due to the present of SPPs and microcavity mode.
Assessment of Groove Parameters of Curved Gratings on Optical Disks

HM WANG,SE ACOSTAORTIZ

DOI: https://doi.org/10.1117/12.210761

IF: 1.3

1995-01-01

Optical Engineering

Abstract:In optical storage technology, gratings consisting of curved grooves have been formed in disks to record data and in integrated optical pickup devices to read signal. Groove parameters, such as pitch, width, and depth, can be inspected by the light diftraction method. Diffraction patterns are usually analyzed without considering the curvature of grooves. A model is developed to examine diffraction patterns of curved grooves. Theories for uncurved and curved grooves are compared. An optical inspection system is developed. Experimental results are analyzed and compared with theories.
Analysis of infrared radiation from optical window with graded temperature distribution

Li Xiaotong,Cen Zhaofeng,Liu Qiangsheng

DOI: https://doi.org/10.1117/12.757836

2008-01-01

Abstract:When the outside temperature rapidly changes, there is graded temperature distribution at optical window in infrared detection systems and the detection sensitivity will be affected. It is necessary to analyze the response of detector according to the temperature distribution. In this paper the graded temperature distribution is described in optical system parameters as environment data, the radial graded temperature function using orthogonal polynomial method is created, and the temperature of any position at optical window can be calculated easily. Based on the principles of blackbody radiation, the sampling plans of wavelength and thermal radiation source surface are presented. Having imaged each surface at object space or image space, the common entrance for infrared radiation from the window is found and named as thermal pupil, then sampling at the entrance to create millions of rays. These rays are traced through the system with energy and the power spectral density is calculated. Taken an infrared optical system as an example, the radiation of its optical window with temperature of 30 degrees C and 55 degrees C +/- 5 degrees C is analyzed. As shown by the example that the radial temperature gradient will lead to nonhomogeneous noise at the image.
Performance of a Soft X-ray Splitter Grating Parallelism Measuring System by Diffraction Method

谭鑫,刘颖,刘正坤,付绍军

DOI: https://doi.org/10.3969/j.issn.1007-4252.2009.01.010

2009-01-01

Abstract:We present new progress in the diffraction grating interferometer being pre-aligned used a double frequency grating. To measure the parallelism of the double frequency grating to a nicety before built in the interferometer, a device based on Diffraction Technique for measuring the parallelism of the double frequency grating is designed. It is built of a semiconductor laser, a collimator, gratings, a preci-sion tumplate, a beeline workbench, a redressal shelves, a ccd detector. The system error of the device is analyzed in this paper, and the parallelism of the double frequency grating is measured by this device. The results demonstrate that the diffraction measuring device suits the parallelism measured the diffraction grat-ing interferometer based on the double frequency grating of that parallelism can attain a high pre-aligning precision.
Numerical Investigation Of A Non-Interferometric Grating-Based X-Ray Imaging System

Zhiqiang Chen,Ran Zhang,Li Zhang

DOI: https://doi.org/10.1109/NSSMIC.2013.6829160

2013-01-01

Abstract:Grating-based X-ray imaging can be classified into two categories: interferometric and non-interferometric. Interferometric setup, i.e. Talbot-Lau interferometer, has been intensively investigated in the recent past. To increase the angular sensitivity and maintain a reasonable system length, gratings with very small period are preferred, while the fabrication of such gratings remains challenging. Another obstacle for the interferometric setup is the degradation of visibility when using broadband Xray sources, especially when operated at high Talbot orders. Non-interferometric setup uses a geometrical projection relation, thus has a more flexible system geometry. In this paper, we investigate the impact of several factors including grating period, intergrating distance and X-ray spectrum on the performance of the system using wave-optical simulations. In particular, we focus on the visibility of the phase stepping curve. Based on the simulation results, we discuss the design aspects and limitations of the non-interferometric setup.
Investigation on the properties of a laminar grating as a soft x-ray beam splitter.

Ying Liu,Hans-Jörg Fuchs,Zhengkun Liu,Huoyao Chen,Shengnan He,Shaojun Fu,Ernst-Bernhard Kley,Andreas Tünnermann

DOI: https://doi.org/10.1364/AO.49.004450

IF: 1.9

2010-01-01

Applied Optics

Abstract:Laminar-type gratings as soft x-ray beam splitters for interferometry are presented. Gold-coated grating beam splitters with 1000 lines/mm are designed for grazing incidence operation at 13: 9 nm. They are routinely fabricated using electron beam lithography and ion etching techniques. The laminar grating is measured to have almost equal absolute efficiencies of about 20% in the zeroth and -1st orders, which enables a fringe visibility up to 0.99 in the interferometer. The discrepancy of the grating profiles between the optimized theoretical and the experimental results is analyzed according to the comparison of the optimized simulation results and the measurement realization of the grating efficiencies. By a precise control of the grating profile, the grating efficiency in the -1st order and the fringe visibility could be improved to 25% and 1, respectively. (C) 2010 Optical Society of America
Study on the Precision Measurement of High-Flux Large Aperture Sampling Grating

Yuan Hao-yu,Chen Yong-quan,Peng Zhi-tao,Duan Ya-xuan,Wu Jian-hong,Fu Shao-jun

DOI: https://doi.org/10.1117/12.2002127

2012-01-01

Abstract:This paper describes an effective method for the measurements of large aperture sampling grating, the sampling efficiency the sampling focal length and the sampling angle. By using a 351nm collimation laser source to scan the full aperture of the sampling grating in every subregion, the diffraction power of “0” order and “+1” order can be obtained synchronously by two standard integrating balls, And then by calculating the sampling efficiency of this subregion and splicing the acquisition data, we can get the averaged grating sampling efficiency in the full aperture.Based on this method, we can effectively eliminate the effect of the output instability of laser source, decrease the uncertainty of test results. According to the fabrication principle of the sampling grating, measurements for the sampling focal length and the sampling angle can be performed. Test rersults indicate that this method can be used to measure large aperture sampling gratings
Diffraction of light from optical disks

Haiming Wang

DOI: https://doi.org/10.1117/12.196541

IF: 1.3

1995-01-01

Optical Engineering

Abstract:The author reports a method for inspection of optical disks based on diffraction measurements. An optical disk has very fine grooves, so that light diffracted from it is spread over large angles, and the change of inclination factor related to Fresnel's coefficients at grooves cannot be ignored. To predict diffraction patterns, Fraunhofer's integral has to be modified. In actual fabrication the groove form may deviate from the ideal rectangular cross section. Moreover, multiple reflections from substrate surfaces can also affect the diffraction patterns. A method is presented to measure the power spectrum of a light beam scattered or diffracted by an optical disk and to recover parameters (pitch, width, and depth of grooves) of optical disks from these power spectra. The wide-angle diffraction problem is solved by taking effects of the inclination factor into account. The effects of groove form and multiple reflections on the diffraction patterns are also included in the theory. To estimate the accuracy of this method, the optical disks were also examined by the SEM technique, The two methods yield results agreeing to 1.9% for the pitch, 5.6% for the width, and 8.6% for the depth.
Spectrum Envelope Analysis for Interleaved Sampled Gratings with Phase-Shift

Xiaoying He,Yonglin Yu,Dexiu Huang,Ruikang Zhang,Wen Liu,Shan Jiang

DOI: https://doi.org/10.1016/j.optcom.2007.09.015

IF: 2.4

2008-01-01

Optics Communications

Abstract:An analytical method is proposed for calculating reflection-spectrum envelope of interleaved sampled gratings with phase-shifts. Effects of parameters on reflection-spectrum envelope of the grating are discussed, such as two grating segment lengths, phase-shift and interleaved length. The unique optimal interleaved length can be obtained to provide the broadest flat-top reflection-spectrum envelope without ripples. Accuracy of the analytical expression is verified due to the calculated results in good agreement with the reflection spectra obtained by the piecewise uniform transform matrix method.
Motionless and fast measurement technique for obtaining the spectral diffraction efficiencies of a grating

Shenghao Wang,Shijie Liu,Jianda Shao,Yonglu Wang,Fanyu Kong,Yunxia Jin

DOI: https://doi.org/10.1063/1.5030069

2018-06-19

Abstract:The measurement of the spectral diffraction efficiencies of a diffraction grating is essential for improving the manufacturing technique and for assessing the grating's function in practical applications. The drawback of the currently popular measurement technique is its slow speed due to the hundreds of repetitions of two kinds of time-consuming mechanical movements during the measuring process (i.e., the rotation of the mechanical arm to capture the light beam, and the mechanical variation of the output wavelength of the grating monochromator). This limitation greatly restricts the usage of this technique in dynamic measurement. In this manuscript, we present a motionless and fast measurement technique for obtaining the spectral diffraction efficiencies of a plane grating, effectively eliminating the aforementioned two kinds of mechanical movement. Herein, the proposed solution for removing the first kind of mechanical movement is tested, and the experimental result shows that the proposed method can be successfully used to measure the plane transmission grating's spectral diffraction efficiencies in the wavelength range of 550-750 nm. The method for eliminating the second kind of mechanical movement is not verified in this manuscript; however, we think that it is very straightforward and commercially available. We estimate that the spectral measurement can be achieved on a millisecond timescale by combining the two solutions. Our motionless and fast measuring technique will find broad applications in dynamic measurement environments and mass industrial testing.

Instrumentation and Detectors
A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers

Linbin Luo,Shuonan Shan,Xinghui Li

DOI: https://doi.org/10.3390/s24206617

IF: 3.9

2024-10-15

Sensors

Abstract:The unique diffractive properties of gratings have made them essential in a wide range of applications, including spectral analysis, precision measurement, optical data storage, laser technology, and biomedical imaging. With advancements in micro- and nanotechnologies, the demand for more precise and efficient grating fabrication has increased. This review discusses the latest advancements in grating manufacturing techniques, particularly highlighting laser interference lithography, which excels in sub-beam generation through wavefront and amplitude division. Techniques such as Lloyd's mirror configurations produce stable interference fringe fields for grating patterning in a single exposure. Orthogonal and non-orthogonal, two-axis Lloyd's mirror interferometers have advanced the fabrication of two-dimensional gratings and large-area gratings, respectively, while laser interference combined with concave lenses enables the creation of concave gratings. Grating interferometry, utilizing optical interference principles, allows for highly precise measurements of minute displacements at the nanometer to sub-nanometer scale. This review also examines the application of grating interferometry in high-precision, absolute, and multi-degree-of-freedom measurement systems. Progress in grating fabrication has significantly advanced spectrometer technology, with integrated structures such as concave gratings, Fresnel gratings, and grating–microlens arrays driving the miniaturization of spectrometers and expanding their use in compact analytical instruments.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
On-line Detection of Varied-line-space Holographic Grating

HE Shi-ping,Ye Chao,WANG Ru

DOI: https://doi.org/10.3969/j.issn.1001-4888.2005.02.001

2005-01-01

Abstract:Owing to its ability of focusing automatically, eliminating aberration, high resolution and easy equipment, the varied line space (VLS) grating has significant application in synchrotron radiation devices, laser fusion equipment etc. The fabrication of VLS grating holographic record has been paid more and more attention. Quality control is a key factor. It requires high accurate measurement techniques, especially on-line measurement techniques. In this paper, the morie interferometry method and fringe image process technique are used to on-line detection of VLS grating line density during the fabrication, and the detection method and relative technique are discussed.The expression of a grating line density was discussed. The relevant formulas used to detection of VLS grating line density were deduced. The on-line detecting principle of VLS grating line density and image processing method of the interference fringes were introduced.
Determination of groove density for bending gratings

Bin LIU,Jun LOU,Zheng-kun LIU,Qiu-ping WANG,Xiang-dong XU,Shao-jun FU

DOI: https://doi.org/10.3321/j.issn:1004-924X.2006.06.011

2006-01-01

Abstract:Primary researches on the groove density variations of bending grating were experimented. Firstly, highly varied line-spacing gratings (nearly 9.2 line/mm) were fabricated. Meanwhile thin glasses with the thickness of 0.16 mm were chosen as their substrates. Consequently, the long trace profiler was used to test the curved substrates precisely and the groove density of the gratings were measured by diffractive method. Experimental result shows that the error is 0.41 line/mm rms between experimental and theoretical values.
Central Wavelength Shift Analysis Between Laboratory and Field Spectral Calibrations of Grating Based Imaging Spectrometer

Wang Ming-zhi,Yan Lei,Yang Bin,Gou Zhi-yang

DOI: https://doi.org/10.3964/j.issn.1000-0593(2013)08-2280-06

2013-01-01

Spectroscopy and spectral analysis

Abstract:Spectral calibration must be carried out in order to determine its central wavelength and half-wave band width of each pixel before the usage of imaging spectrometer. But it was found out that these parameters vary as environment changes. The present paper studies the effect based on test field data. The authors analyzed the optical structure and compared the working environmental parameters. Then a theoretical model is established and the influences of vibration, distortion and temperature parameters are evaluated. The theoretical model and the caculation results are in good consistency, which testifies the theoretical model. This research will shed some light on the high accuracy spectral calibration of the grating based imaging spectrometer and its manufacture.
Effects of Pattern Parameters on the Optical Disk Readout Signals

YY Wang,JP Xiong,HB Jia,XF Cheng

DOI: https://doi.org/10.1117/12.483333

2002-01-01

Abstract:The diffraction theory, which includes scalar and vector diffraction theory, is an important basal theory in the field of optical storage. The purpose of this paper is to analyze the needs of using vector diffraction theory instead of scalar diffraction theory in the study of the digital versatile disk (DVD) or other high-density optical disks, and summarizes the effects of the optical disk pattern parameters on the readout signals. The grating is adopted as the physical model of optical disk in this research. And the readout signals are calculated only versus some parameters, involving the transverse dimensions, the depths and the slopes, of the information marks with vector diffraction theory. Accordingly some key factors to guarantee the optical disk manufacture quality are put forward, and these factors resulted from this study may be useful to improve the optical disk manufacture technica, furthermore, the vector analysis methods adopted herein are referable to higher density optical storage research.

The testing and investigation of grating spectral intensity

A New Subdivision Technique For Grating Based On Cmos Microscopic Imaging

Diffraction Property of Tapered Grating

The Method for Measuring the Groove Density of Variable-Line-space Gratings with Elimination of the Eccentricity Effect.

A New System for Measuring the Diffraction Efficiency of Large Aperture Gratings

Performance of a Grating Groove Density Measuring System by Diffraction Method

INVESTIGATION ON THE SPECTRAL PROPERTIES OF GRATINGS BASED ON FDTD METHOD

Assessment of Groove Parameters of Curved Gratings on Optical Disks

Analysis of infrared radiation from optical window with graded temperature distribution

Performance of a Soft X-ray Splitter Grating Parallelism Measuring System by Diffraction Method

Numerical Investigation Of A Non-Interferometric Grating-Based X-Ray Imaging System

Investigation on the properties of a laminar grating as a soft x-ray beam splitter.

Study on the Precision Measurement of High-Flux Large Aperture Sampling Grating

Diffraction of light from optical disks

Spectrum Envelope Analysis for Interleaved Sampled Gratings with Phase-Shift

Motionless and fast measurement technique for obtaining the spectral diffraction efficiencies of a grating

A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers

On-line Detection of Varied-line-space Holographic Grating

Determination of groove density for bending gratings

Central Wavelength Shift Analysis Between Laboratory and Field Spectral Calibrations of Grating Based Imaging Spectrometer

Effects of Pattern Parameters on the Optical Disk Readout Signals