Photoluminescence and Raman Spectroscopy Characterization of Boron- and Nitrogen-Doped 6H Silicon Carbide

Yiyu Ou,Valdas Jokubavicius,Chuan Liu,Rolf W. Berg,Margareta Linnarsson,Satoshi Kamiyama,Zhaoyue Lu,Rositza Yakimova,Mikael Syvajarvi,Haiyan Ou
DOI: https://doi.org/10.4028/www.scientific.net/msf.717-720.233
2012-01-01
Materials Science Forum
Abstract:Nitrogen-boron doped 6H-SiC epilayers grown on low off-axis 6H-SiC substrates have been characterized by photoluminescence and Raman spectroscopy. The photoluminescence results show that a doping larger than 1018 cm-3 is favorable to observe the luminescence and addition of nitrogen is resulting in an increased luminescence. A dopant concentration difference larger than 4x1018 cm-3 is proposed to achieve intense photoluminescence. Raman spectroscopy further confirmed the doping type and concentrations for the samples. The results indicate that N-B doped SiC is being a good wavelength converter in white LEDs applications.
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