New Type Of Common-Path Heterodyne Profilometer

jinjin li,yang zhao,dacheng li

DOI: https://doi.org/10.1117/12.245176

1996-01-01

Abstract:A new type of non-contact heterodyne profilometer with annular lens is described in this paper. The surface can be measured without the separated reference surface. The theoretical lateral resolution of this system becomes much higher of 1 m. The optical structure is easy to set up.

What problem does this paper attempt to address?

Single-Shot White-Light Dispersive Interferometric Profilometer

Pei Zhu,Kaiwei Wang,Shuangshuang Zhao

DOI: https://doi.org/10.1117/12.869987

2010-01-01

Abstract:Traditional interferometric profilemeter suffers from phase ambiguity problem and sensitivity to environmental disturbance, thus preventing their applications for on-line surface inspections. We propose a new method to obtain the object surface's two-dimensional profile in a single shot using a dispersive interferometer. An air-spaced Fabry-Perot etalon was applied in order to decompose the light from the broadband source into discrete monochromatic constituents with equal wavelength interval. A blazed grating is implemented to effectively separate the interferograms of difference wavelength. As a result, the interference patterns of different wavelengths distributed separately on the CCD camera. By analyzing these patterns one can get the configuration of the original surface. A one-dimensional profiling experiment is carried out to test a surface with steps and the mean error of the result is below 0.2 mu m.
Two-dimensional Surface Profile Imaging Technique Based on a Double-Grating Frequency Shifter

KW Wang,LJ Zeng

DOI: https://doi.org/10.1364/ao.44.004625

IF: 1.9

2005-01-01

Applied Optics

Abstract:A two-dimensional surface profile imaging technique that uses a low-coherence heterodyne interferometer is proposed. A double-grating frequency shifter was used in a tandem interferometer to provide the achromatic frequency shift for low-coherence light. A chopper, together with a processing circuit, was implemented to modulate the interference fringes. The surface profile was measured from the interference fringes taken by a CCD camera using a five-step method. The uncertainty in the displacement measurement is 0.34 microm for a displacement range of 43 microm. The surface profile of a glass sample with low effective reflectivity was acquired.
Near Common-Path Optical Fiber Interferometer for Potentially Fast On-Line Microscale-Nanoscale Surface Measurement

Xiangqian Jiang,Kaiwei Wang,Haydn Martin

DOI: https://doi.org/10.1364/ol.31.003603

2007-01-01

SPIE Newsroom

Abstract:We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.
Laser Heterodyne Profilometer with Several Improved Techniques

X LI,J WANG,Y ZHAO,M CAO,DC LI

DOI: https://doi.org/10.1117/12.162104

1993-01-01

Abstract:An optical heterodyne system for the measurement of profile and roughness has been developed. Several improved techniques are employed. The optical system was designed with entire common path. The effect of sample vibration and the thermal drift could be eliminated. A modified objective was used to perform respectively the measurement beam and the reference beam. The detected signals were processed with phase comparison technique to give a high accuracy. The optical system can be developed to an accessory of the Zeeman laser interferometers.
Low Noisy Dual Wavelength Digital Holography and Application in the Ultra-precision Machining Surface Measurement

Weiqing PAN,Guofang GONG,Yufeng FAN

DOI: https://doi.org/10.3969/j.issn.1003-501X.2015.01.005

2015-01-01

Abstract:Through the subtraction of two digital holographic wrapped phases for different wavelengths, it yields a beat phase image corresponding to an equivalent wavelength to remove the phase wrapping. By comparing the beat phase image with any recoding wavelength, the position and multiple of the single wavelength phase jump are confirmed. Hence, the wrapped phase in single wavelength phase is wrapped and the phase noise is kept fixed. Simulation and experimental results demonstrate the measure error induced by the phase noise can be reduced to 2Λ/λm. An optical microstructure element surface is measured by the proposed digital holography with dual wavelength of 650 nm and 632.8 nm. The measured optical element is produced with Fast Tool Servo (FTS). The unwrapped phase image of machining mark on the surface of microstructure element is acquired clearly. The equivalent wavelength is 0.024 mm. Then, the three dimensional data of the microstructure profile respectively in high frequency and low frequency regions are obtained by frequency filtering. The roughnesses corresponding to different frequency region are 33.2 nm, 19.3 nm and 23.4 nm respectively. The affecting factors for different machining mark are analyzed. The cutting parameters of the FTS are also deduced.
Research on Two Optical Methods for Aspheric Measurement

Zhu Yongjian,Yin Shaohui,Sheng Xiaomin,Tang Kun

DOI: https://doi.org/10.3321/j.issn:1004-132x.2009.03.005

2009-01-01

Abstract:To realize the 3D profilometry,a four-step phase shifting method integrated with fringes projection was adopted.In the fringe-projection profilometry,a computer-simulated fringe patterns was projected on the free-form surface of object and the fringes were captured by the phase-shifting technique.Automatic image-processing software with the proposed DCT-based phase-reconstructing algorithm was developed to reconstruct the continuous phase map from fringe patterns.The final 3D profile of object was obtained from the phase map.The corresponding experiments were conducted independently.In interferometry,a new-type interferometer was proposed,which combined the radial shear interferometer with simultaneous phase-shifting technique.It was based on the optical path with two Jamin glass plates and realized the collection of four frames of fringe patterns according to the principle of polarized light.It can test the full-field surface with different sizes and be free from vibration.The theoretical accuracy of this interferometer can reach 1/100 wavelength.Because it enjoys high anti-Jamming performance,the proposed interferometer can realize the high-precision dynamic measurement of aspheric surface under the common conditions without any vibration-isolated setup.
Full Area Covered 3D Profile Measurement of Special-Shaped Optics Based on a New Prototype Non-Contact Profiler.

Hui-Lin Du,Zhao-Zhong Zhou,Ze-Qing Sun,Bing-Feng Ju,Shaoning Xu,Anyu Sun

DOI: https://doi.org/10.1063/1.4984124

IF: 1.6

2017-01-01

Review of Scientific Instruments

Abstract:A new prototype non-contact profiler based on surface tracking has been specially developed. Surface tracking is carried out by a specially designed dual stage probe system with the aid of a four-Degree Of Freedom high-precision motion platform. The dual stage probe system keeps a short-range optical probe constantly tracking the surface by a self-developed voice coil motor servo, by which a wide measuring range of up to 10 mm is realized. The system performance evaluation including resolution, repeatability, and scanning speed proved the good capability of the new prototype non-contact profiler. To realize a full area covered 3D profile measurement of special-shaped optics within one scanning procedure, a signal intensity monitor integrated in the surface tracking controller is specially developed. In the experiment, a snip-single-corner-rectangular-shaped freeform surface was successfully measured over full area by the new non-contact profiler. This work provides an effective solution for 3D profile measurement of special-shaped optical surfaces over full reflecting area. Experimental results demonstrate that the proposed measuring system is of great significance in quality evaluation of optical surfaces.
Optical Acceleration Measurement Method with Large Non-ambiguity Range and High Resolution Via Synthetic Wavelength and Single Wavelength Superheterodyne Interferometry

Qianbo Lu,Dexin Pan,Jian Bai,Kaiwei Wang

DOI: https://doi.org/10.3390/s18103417

IF: 3.9

2018-01-01

Sensors

Abstract:Interferometric optomechanical accelerometers provide superior resolution, but the application is limited due to the non-ambiguity range that is always less than half of the wavelength, which corresponds to the order of mg. This paper proposes a novel acceleration measurement method based on synthetic wavelength and single wavelength superheterodyne interferometry to address this issue. Two acousto-optical modulators and several polarizers are introduced to the two-wavelength interferometry to create four beams with different frequencies and polarization states, and two ultra-narrow bandwidth filters are used to realize the single wavelength measurement simultaneously. This technique offers the possibility to expand the non-ambiguity range without compromising the high resolution. Also, the superheterodyne phase measurement and the corresponding processing algorithm are given to enable real-time measurement. A prototype is built and the preliminary experimental results are compared with the simulation results, showing good agreement. The results prove an estimated acceleration measurement resolution of around 10 μg and a non-ambiguity range of larger than 200 mg, which is more than 100 times that of the single wavelength-based optical accelerometer.
Development of Non - contact Measurement System Based on the Integration of Laser Probe and NC Machine Tools

Jian LI,Wen WANG,Zi-chen CHEN

DOI: https://doi.org/10.3969/j.issn.1001-3881.2005.10.010

2005-01-01

Abstract:A non-contact measurement method of freeform surface was proposed,which is realized through integration of NC(numerical-controlled) machine tools and laser probe.The measurement principle of the system was introduced.The hardware and software components were analyzed and realized respectively.Finally the effectiveness of the method was verified by a measurement example.
Compact Design of Projection Lens for 3D Profilometry Based on Interferometric Fringes

Yongjian Zhu,Weiqing Pan,Jianfeng Sun,Anhu Li,Yong Li

DOI: https://doi.org/10.1016/j.ijleo.2011.11.068

IF: 3.1

2013-01-01

Optik

Abstract:As for the new type of 3D fringe-based profilometry we proposed, a compact projection lens is designed to meet the requirements of interferometric fringes magnification. Fringe projection profilometry requires that the projection lens has super short focus length and wide field of view (FOV) as well as large projection area as possible. In this case, the measurement system is able to capture a frame of fringe map with enough information of object and achieve a high accuracy. Thus the projection lens was designed with focus length of 9.45 mm, F-number of 2.8 and FOV of 72.45°. The total track of lens was 76.355 mm, less than 80 mm. The projection resolutions were 800 × 600 pixels. The lens design showed that the modulation transfer function (MTF) is higher than 80% at 32 lp/mm for all field angles. The maximum distortion was about −3.0% at field angle of 72.45°. According to the size requirement of measured object, the projection area was 40″ at the distance of 1 m. Therefore, the compact lens design with super short focus length and wide FOV as well as large projection area is absolutely adaptable for the 3D fringe-based profilometry which is shown in this paper. Meanwhile, the proposed lens design could also be used for the mini LCoS (Liquid Crystal on Silicon) projector.
Optical Profilometer Based on the Principle of Differential Interference

QL Li,H Gao,SF Xue,Y Li

DOI: https://doi.org/10.1117/1.1359794

IF: 1.3

2001-01-01

Optical Engineering

Abstract:An optical profilometer based on the principle of differential interference has been developed. Using a common-light-path interfer- ence scheme, the instrument is insensitive to vibration, air turbulence, and temperature variation. Experimental results demonstrate that the vertical resolution and the repeatability of the instrument are both better than 1 nm in an ordinary environment. © 2001 Society of Photo-Optical Instru-
A Two-Dimensional Surface Profile Imaging Technique Based on Heterodyne Interferometer

K. W. Wang,Z. J. Cai,Li Jiang Zeng

DOI: https://doi.org/10.4028/www.scientific.net/KEM.295-296.477

2005-01-01

Key Engineering Materials

Abstract:A two-dimensional surface profile imaging technique based on heterodyne interferometer is proposed. A piezo translator vibrated grating is used to generate a heterodyne signal. A high speed CCD camera is used to extract the interference signal using a five step method. The uncertainty in the displacement measurement is approximately. 0.035 mu m within a measurement range of 1.7 mu m, confirming the two dimensional heterodyne interferometer is valid for measuring the surface profile. The method is also available for low coherence heterodyne interferometer due to the optical frequency shifts caused by the vibration of grating independent on the wavelength.
A dual-probe three-dimensional profile measurement system

Li Guo,Yage Zhou,Dongxian Zhang,Haijun Zhang

DOI: https://doi.org/10.3788/AOS20082802.0249

2008-01-01

Abstract:A new three-dimensional (3D) profile measuring method which combines the atomic force microscopic (AFM) probe with the position sensitive detector (PSD) range probe is proposed. This method can obtain both the large size 3D profile and micro morphological character of a point on the sample. A dual-probe 3D profile measuring system is developed. The working principle is elaborated and the three parts of the system, the dual-probe, the step-controlled scanning stage and the computer controlling center are illuminated. The measuring range of the system is demarcated by measuring a known grating of 2000 line/mm. The 3D surface profile images in local morphology and entire profile of an annular gasket with inside and external diameter of 4 mm and 8 mm are given respectively. The experimental results show that this system is expected to be utilized both in large range measurement and local three-dimensional reconstruction with high-precision for samples which are of different sizes and materials.
New 3D surface profile measurement based on phase-shift interfering technology

Bo Liu,Jian Zhang,Jianying Fan,Ling Yang

DOI: https://doi.org/10.1117/12.304407

1998-04-01

Abstract:This paper describes a kind of profiler with the above features. It uses the white-light interfering method and adopts the structure of Micelson interferometer. It includes the light bulb used as the light resource, CCD used as the sensor, PZT providing microscopic translating and the computer sampling and processing data with high speed. When the reference-mirror translating, computing and comparing the modulation M of each point of the surface will give their relative surface height. Then we obtain the surface profile of object to be measured.

Physics,Engineering,Materials Science
A Surface Profilometer Based on Laser Confocal Feedback

Weiping Wang,Shulian Zhang

DOI: https://doi.org/10.1364/fio.2015.fm1g.3

2015-01-01

Abstract:An optical surface profilometry method is developed based on microchip Nd:YVO4 laser feedback and confocal technologies. The signal is detected using heterodyne approach to ensure environmental robustness and invulnerability to the laser instability.
A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of Dual-Axis Absolute and Relative Displacement

Ran Zhao,Chong Chen,Xin Xiong,Yuanliu Chen,Bingfeng Ju

DOI: https://doi.org/10.3390/s22249906

IF: 2.398

2024-01-01

Measurement Science and Technology

Abstract:This paper presents a fiber-based chromatic dispersion probe for the simultaneous measurement of dual-axis absolute and relative displacement with nanometric resolutions. The proposed chromatic dispersion probe is based on optical dispersion. In the probe, the employed light beam is split into two sub-beams, and then the two sub-beams are made to pass through two optical paths with different optical settings where two identical single-mode fiber detectors are located at different defocused positions of the respective dispersive lenses. In this way, two spectral signals can be obtained to indicate the absolute displacement of each of the dual-axes. A signal processing algorithm is proposed to generate a normalized output wavelength that indicates the relative displacement of the dual-axis. With the proposed chromatic dispersion probe, the absolute and relative displacement measurements of the dual-axis can be realized simultaneously. Theoretical and experimental investigations reveal that the developed chromatic dispersion probe realizes an absolute measurement range and a measurement resolution of approximately 180 μm and 50 nm, respectively, for each axis. Moreover, a relative displacement measurement range and a measurement resolution of about 240 μm and 100 nm, respectively, are achieved for the dual-axis.
Multi-Wavelength Holographic Profilometry

eduardo a barbosa,m r gesualdi,a muramatsu,y l sheng,s l zhuang,y m zhang

DOI: https://doi.org/10.1117/12.668293

2006-01-01

Abstract:A novel method for surface profilometry by holography is presented. We used a diode laser emitting at many wavelengths simultaneously as the light source and a Bi12TiO20 (BTO) crystal as the holographic medium in single exposure processes. The employ of multi-wavelength, large free spectral range (FSR) lasers leads to holographic images covered of interference fringes corresponding to the contour lines of the studied surface. In order to obtain the relief of the studied surface, the fringe analysis was performed by the phase stepping technique (PST) and the phase unwrapping was carried out by the Cellular-automata method. We analysed the relief of a tilted flat metallic bar and a tooth prosthesis.
Dynamic Confocal Optical Probe Based on Time Difference Measurement

FAN Yu-ming,ZHANG Guo-xiong,GAO Xiang,QIU Zu-rong,Guo jing-bin,ZHANG Hong-wei,LI Zhi,ZHAO Shu-zhong

DOI: https://doi.org/10.3969/j.issn.0493-2137.2005.05.007

2005-01-01

Abstract:Based on a study on an optical dynamic active confocal probe, a new method of measuring deviation focus is developed in order to meet the increasing requirements of the dimensional control and profile monitoring of the products such as mechanical, optical and electronic ones. The key point of this new method is that displacement of the turning fork is converted to time difference measurement, thus the optical and mechanical structures of the laser probe system can be simplified greatly, and its accuracy and stability are enhanced. Then a new integrated measurement system is designed with error analyzed in detail. Experiments evaluating nonlinearity and measuring range and performance are carried out. Results show that the nonlinearity error is 0.45 μm within the range of ±0.1 mm, and its response is 0.075 μm.
Profile Measurements of Micro-Aspheric Surfaces Using an Air-Bearing Stylus with A Microprobe

Atsushi Shibuya,Wei Gao,Yasuo Yoshikawa,Bing-Feng Ju,Satoshi Kiyono

IF: 2.0411

2007-01-01

International Journal of Precision Engineering and Manufacturing

Abstract:A novel scanning probe measurement system was developed to enable precise profile measurements of microaspheric surfaces. An air-bearing stylus with a microprobe was used to perform the surface profile scanning. The new system worked in a contact mode and had the capability of measuring micro-aspheric surfaces with large tilt angles and complex profiles. Due to limitations resulting from the contact mode, such as possible damage caused by the contact force and lateral resolution restrictions from the curvature of the probe tip, several system improvements were implemented An air bearing was used to suspend the shaft of the probe to reduce the contact force, enabling fine adjustments of the contact force by changing the air pressure. The movement of the shaft was measured by a linear encoder with a scale attached to the actual shaft to avoid Abbe errors. A 50 mu m-diameter glass sphere was bonded to the tip of the probe to improve the lateral resolution of the system. The maximum contact force of the probe was 10 mN. The shaft was capable of holding the probe continuously if the contact force was less than 40 mN, and the resolution of the probe could be as high as 10 nm. The performance of the new scanning probe measurement system was verified by experimental data.
Laser Confocal Feedback Profilometry

Xinjun Wan,Shulian Zhang,Zhou Ren

DOI: https://doi.org/10.1117/12.792752

2008-01-01

Abstract:In this paper, a novel profiling method, Laser Confocal Feedback Profilometery (LCFP), combining quasi-common-path heterodyne phase detection with laser confocal feedback technology, is proposed. A microchip Nd:YAG laser emits 1064nm laser, which passes through a pinhole and frequency shifter, and is focused onto the sample surface. The reflected light is coupled back to the microchip laser cavity and forms the frequency shifted feedback light, causing the laser intensity modulation. When the sample is scanned laterally, its surface height variation changes both the Phase and strength of the feedback light. LCFP then extracts both the amplitude and phase information out of the laser intensity modulation to determine the integral and fractional number of half laser wavelengths contained in the height variation of two points on the sample surface. LCFP can thus overcome the half-laser-wavelength limit of phase measurement in the axial direction. The high sensitivity of microchip laser to feedback light makes LCFP able to measure samples with very low reflectivity. The LCFP experimental setup is built, and it has successfully measured the height of the stages on a glass-substrate grating. The current performances of LCFP are as followed: the axial resolution is better than 2nm, the axial range about 5 mu m, and the detectable reflectivity as low as 10(-9). Due to its direct traceability to laser wavelength, LCFP can potentially be used as the metrology standard of small-scale features.

New Type Of Common-Path Heterodyne Profilometer

Single-Shot White-Light Dispersive Interferometric Profilometer

Two-dimensional Surface Profile Imaging Technique Based on a Double-Grating Frequency Shifter

Near Common-Path Optical Fiber Interferometer for Potentially Fast On-Line Microscale-Nanoscale Surface Measurement

Laser Heterodyne Profilometer with Several Improved Techniques

Low Noisy Dual Wavelength Digital Holography and Application in the Ultra-precision Machining Surface Measurement

Research on Two Optical Methods for Aspheric Measurement

Full Area Covered 3D Profile Measurement of Special-Shaped Optics Based on a New Prototype Non-Contact Profiler.

Optical Acceleration Measurement Method with Large Non-ambiguity Range and High Resolution Via Synthetic Wavelength and Single Wavelength Superheterodyne Interferometry

Development of Non - contact Measurement System Based on the Integration of Laser Probe and NC Machine Tools

Compact Design of Projection Lens for 3D Profilometry Based on Interferometric Fringes

Optical Profilometer Based on the Principle of Differential Interference

A Two-Dimensional Surface Profile Imaging Technique Based on Heterodyne Interferometer

A dual-probe three-dimensional profile measurement system

New 3D surface profile measurement based on phase-shift interfering technology

A Surface Profilometer Based on Laser Confocal Feedback

A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of Dual-Axis Absolute and Relative Displacement

Multi-Wavelength Holographic Profilometry

Dynamic Confocal Optical Probe Based on Time Difference Measurement

Profile Measurements of Micro-Aspheric Surfaces Using an Air-Bearing Stylus with A Microprobe

Laser Confocal Feedback Profilometry