Improved Resistive Switching Properties of Solution-Processed Tiox Film by Incorporating Atomic Layer Deposited Tio2 Layer
Insung Kim,Seungjae Jung,Jungho Shin,Kuyyadi P. Biju,Kyungah Seo,Manzar Siddik,Xinjun Liu,Jaemin Kong,Kwanghee Lee,Hyunsang Hwang
DOI: https://doi.org/10.1143/jjap.50.046504
IF: 1.5
2011-01-01
Japanese Journal of Applied Physics
Abstract:Resistive switching characteristics of bilayered titanium oxides layer were investigated. To improve the relatively poor electrical characteristics of solution-processed TiOx active layers, we incorporated an additional thin TiO2 (∼8 nm) layer by atomic layer deposition. The bilayered titanium oxide active layer showed a significantly improved performance, such as a larger ON/OFF ratio, a stable resistive switching over 100 times under a dc voltage sweep, cell-to-cell uniformity, and high device yield (>90%). These improved properties can be explained by the transition of the resistive switching mechanism from filamentary switching through the defective side in solution-processed TiOx to interfacial switching resulting from the oxygen ion migration between two active layers.