Technique and Application of Infrared Thermal Radiometry in Scanning Electron Microscope

JP YIN,ZM WU,SQ ZHU,WJ GAO
DOI: https://doi.org/10.1117/12.182116
1994-01-01
Abstract:In this paper, a new technique of scanning electron thermal radiometry (SETR) is proposed. The technique is a combination of microscopic imaging and microarea thermal analysis which are developed from scanning electron microscopy. The characteristics and applications of SETR are discussed.
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