Research and Applications of Infrared Thermal Microscope Imaging System

Jingjing YUE,Zhimao WU,Erzhen MU,Hong LUO,Jie JIANG,Zhiyu HU
2017-01-01
Abstract:The infrared thermal microscope imaging system is based on technologies of infrared thermal imaging, infrared image processing, and optical microscopy. Such a system can be used to analyze temperature changes of tiny objects or local details, with advantages of non-destructive testing, high sensitivity and so on. The research background of the infrared thermal microscope imaging system is summarized in this article, and the fundamentals and system components are presented. In addition, we summarized the research status of the infrared thermal microscope imaging system and its applications in the field of microelectronic device testing, medical diagnosis, and scientific experiment research. Moreover, the existing problems of the infrared thermal microscope imaging system are analyzed, and its future development trend is forecasted.
What problem does this paper attempt to address?