A Novel Cmos Mems Accelerometer With Four Sensing Finger Arrays

Chih-Mimg Sun,Chuan-Wei Wang,Dong Hang Liu,Michael S. -C. Lu,Weileun Fang

DOI: https://doi.org/10.1109/ICSENS.2007.355822

2006-01-01

Abstract:This study presents a novel CMOS accelerometer with four sensing finger arrays. Moreover, additional springs are also employed for electrical routing. The sensing capacitance is increased for 80%, at the cost of the decreasing of proof mass for 20%. Thus, the sensitivity of the present accelerometer is still increased for near 44%. The measurement results show that the present accelerometer has a gain of 2.94mV/g.