Preparation of Zirconia Thin Films Via Sol-Gel Process from Inorganic Precursor

J Shen,QY Zhang,J Wang,H Lu,TH Yang,ZS Deng,B Zhou,LY Chen
DOI: https://doi.org/10.1117/12.408484
2000-01-01
Abstract:ZrO2 thin films were prepared by sol-gel technology from suitable zirconia aqueous colloidal suspensions containing nanocrystalline ZrO2 at room temperature synthesized by hydrothermal process from inorganic precursor (ZrOCl2. 8H(2)O). By adding a soluble organic binder PVP to the suspension prior to application, it substantially increased the coating refractive index and the abrasion-resistance as well as the laser damage threshold. The features of the coatings and the colloidal suspensions were investigated. Multilayer highly reflective dielectric coatings were also elaborated by laying down quarterwave-thick alternating coatings of the binder-aided zirconia and silica, which was prepared with the sol-gel process fi om TEOS. Laser damage thresholds of 20 and 18 J/cm(2) (1064nm, 1ns) were achieved for single ZrO2-PVP coating and ZrO2-PVP/SiO2 multilayers respectively.
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