Abstract:The properties of sol–gel derived ZrO2 thin films heated via a novel method of rapid thermal annealing process were studied. We investigated the effects of heat-treatment schedules with different ramp rates on the refractive index and thickness of ZrO2 thin films as well. By controlling the heating treatment parameter, the refractive index of the ZrO2 coatings can be adjusted from 1.69 up to 1.9 continuously, which can meet different requirement for high reflectance well. The thickness of crack-free ZrO2 coatings can be easily controlled by employing different experimental parameters. The result of X-ray diffraction shows that as-deposited film is amorphous, and it remains stable up to the heating temperature of 400 °C. However, it begins to crystallize as the temperature increases further attaining 500 °C. Meanwhile, the surface morphology was evaluated by atomic force microscopy and the result shows that the surface of the ZrO2 coating is smooth and uniform with root means square of 0.63 nm for the measured area of 5 × 5 μm. As a typical example, ZrO2 thin films with refractive index of 1.9 are chosen for highly reflective coatings. Nearly full reflective mirror at 1,064 nm was fabricated on fused silica substrate. The laser induced damage thresholds of 22 J/cm2 (1,064 nm, 10 ns) and 14.6 J/cm2 (1,064 nm, 10 ns) are obtained for ZrO2 coating and ZrO2/SiO2 multilayer coatings respectively.

A New Route For Sol-Gel High Refractive Index Zro2 Coating

Preparation of Zirconia Thin Films Via Sol-Gel Process from Inorganic Precursor

Sol-Gel Processing of Zirconia Coating for HR Mirrors with High Laser Damage Threshold

Fabrication of Sol–gel Derived ZrO 2 Thin Film for HR Coatings Via Rapid Thermal Annealing Process

Sol-gel Preparation of a Silica Antireflective Coating with Enhanced Hydrophobicity and Optical Stability in Vacuum

Preparation, Performance and Influencing Mechanism of Zirconia Coating on Three-Dimensional Silicon Carbide via Sol-Gel Process

Influence of Zirconia Sol-Gel Coating on Fracture Strength of Chemical Strengthened Soda Lime Glass

Improvement on Laser-Induced Damage Threshold of Sol-Gel ZrO_2 Coatings by Crystal Structure Tuning

Synthesis of Monolithic Zirconia with Macroporous Bicontinuous Structure Via Epoxide-Driven Sol–gel Process Accompanied by Phase Separation

The preparation of silica-based SiO2-ZrO2 films as waveguides by sol-gel process

Optical characterization of sol-gel ZrO2 coatings with acid alkali two-step method

Preparation of Zirconia Powders by Sol-gel Process

Properties Of Oxide Coatings On The Surface Of Zrh2 Prepared By A Sol-Gel Method With Different Precursor Concentrations

Refractive Index Adjustment of SiO2 Gel Glass with Zirconium Oxychloride

Deposit of ZrO2 Coatings on SiC Fibers by Sol-gel Method

Sol–gel Derived ZrO2–SiO2 Highly Reflective Coatings

Effect of crystal structure on optical properties of sol-gel derived zirconia thin films

(Zro 2 ) 0.85 ( RE O 1.5 ) 0.15 ( RE =sc, Y) Solid Solutions Prepared Via Three Pechini-type Gel Routes: 2—sintering and Electrical Properties

High Refractive Index and Good Mechanical Property Uv-Cured Hybrid Films Containing Zirconia Nanoparticles

High-Temperature Resistance and Corrosion Resistance of Ceria-Yttria Stabilized Zirconia Coating Prepared on Rare-Earth Mg Alloy Surface

PREPARATION OF ZIRCONIA SOL BY ANION EXCHANGE METHOD FROM ZIRCONYL CHLORIDE