Modification and Laser-Damage Resistance of Zirconia Thin Films

LUO Ai-yun,SHEN Jun,YANG Fan,WU Guang-ming,ZHOU Bin,NI Xing-yuan
2006-01-01
Abstract:ZrO_2 sol was obtained by using hydrothermal synthesis.Thin ZrO_2 films and ZrO_2-PVP composite films were prepared with spin coating method.Both the ZrO_2 films and ZrO_2-PVP composite films were characterized by ellipsometer,FTIR,AFM respectively.The crystallization behavior of ZrO_2 xerogels was examined by X-ray diffraction.And 1-on-1 laser-induced damage threshold tests on ZrO_2 films and ZrO_2-PVP composite films were carried out with a Q-switched Nd:YAG high power laser at 1 064 nm with a pulse width of 10 ns.The measured laser-induced damage threshold of ZrO_2 films with heat treatment at 300 ℃ for 60 min was 24.5 J/cm~2,and 37.5 J/cm~2 for that of ZrO_2-PVP composite films.The experimental results show that the incorporating organic binder PVP(polyvinyl pyrrolidone),without obvious influence on film surface micro morphology,helps to improve the performances of ZrO_2 films such as high refractive index,thickness and laser induced damage threshold.The ZrO_2-PVP composite films can achieve good performances with high refractive index of 1.75 and the laser-induced damage threshold of 37.8 J/cm~2,which is 50% higher than that of ZrO_2 films.
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